1/26/2012	8:21:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/26/2012	8:21:35 AM	Recipe started at 8:21 AM
1/26/2012	8:21:35 AM	Helium valve closed
1/26/2012	8:21:35 AM	H2 valve closed
1/26/2012	8:21:35 AM	BCl3 valve closed
1/26/2012	8:21:35 AM	PH3 valve closed
1/26/2012	8:21:35 AM	SiCl4 pre valve closed
1/26/2012	8:21:35 AM	SiCl4 post valve closed
1/26/2012	8:21:35 AM	Main Vac valve closed
1/26/2012	8:21:35 AM	Bypass valve closed
1/26/2012	8:21:35 AM	Bubbler valve closed
1/26/2012	8:21:35 AM	Helium MFC set to  0.000000
1/26/2012	8:21:35 AM	H2 MFC set to  0.000000
1/26/2012	8:21:35 AM	BCl3 MFC set to  0.000000
1/26/2012	8:21:35 AM	PH3 MFC set to  0.000000
1/26/2012	8:21:35 AM	SiCl4 MFC set to  0.000000
1/26/2012	8:21:35 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	8:21:36 AM	Tube furnace set to 0
1/26/2012	8:21:39 AM	H2 valve closed
1/26/2012	8:21:39 AM	BCl3 valve closed
1/26/2012	8:21:39 AM	PH3 valve closed
1/26/2012	8:21:39 AM	SiCl4 pre valve closed
1/26/2012	8:21:39 AM	SiCl4 post valve closed
1/26/2012	8:21:39 AM	Main Vac valve closed
1/26/2012	8:21:39 AM	Bypass valve closed
1/26/2012	8:21:39 AM	Bubbler valve closed
1/26/2012	8:21:39 AM	Helium valve opened
1/26/2012	8:21:39 AM	Helium MFC set to  500.000000
1/26/2012	8:21:39 AM	H2 MFC set to  0.000000
1/26/2012	8:21:39 AM	BCl3 MFC set to  0.000000
1/26/2012	8:21:39 AM	PH3 MFC set to  0.000000
1/26/2012	8:21:39 AM	SiCl4 MFC set to  0.000000
1/26/2012	8:21:39 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	8:21:39 AM	Tube furnace set to 0
1/26/2012	8:22:43 AM	Helium valve closed
1/26/2012	8:22:43 AM	H2 valve closed
1/26/2012	8:22:43 AM	BCl3 valve closed
1/26/2012	8:22:43 AM	PH3 valve closed
1/26/2012	8:22:43 AM	SiCl4 pre valve closed
1/26/2012	8:22:43 AM	SiCl4 post valve closed
1/26/2012	8:22:43 AM	Main Vac valve closed
1/26/2012	8:22:43 AM	Bypass valve closed
1/26/2012	8:22:43 AM	Bubbler valve closed
1/26/2012	8:22:43 AM	Helium MFC set to  0.000000
1/26/2012	8:22:43 AM	H2 MFC set to  0.000000
1/26/2012	8:22:43 AM	BCl3 MFC set to  0.000000
1/26/2012	8:22:43 AM	PH3 MFC set to  0.000000
1/26/2012	8:22:43 AM	SiCl4 MFC set to  0.000000
1/26/2012	8:22:43 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	8:22:43 AM	Tube furnace set to 0
1/26/2012	8:22:44 AM	Run finished at 8:22 AM
1/26/2012	8:22:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/26/2012	8:27:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/26/2012	8:27:45 AM	Recipe started at 8:27 AM
1/26/2012	8:27:45 AM	Helium valve closed
1/26/2012	8:27:45 AM	H2 valve closed
1/26/2012	8:27:45 AM	BCl3 valve closed
1/26/2012	8:27:45 AM	PH3 valve closed
1/26/2012	8:27:45 AM	SiCl4 pre valve closed
1/26/2012	8:27:45 AM	SiCl4 post valve closed
1/26/2012	8:27:45 AM	Main Vac valve closed
1/26/2012	8:27:45 AM	Bubbler valve closed
1/26/2012	8:27:45 AM	Bypass valve opened
1/26/2012	8:27:45 AM	Helium MFC set to  0.000000
1/26/2012	8:27:45 AM	H2 MFC set to  0.000000
1/26/2012	8:27:45 AM	BCl3 MFC set to  0.000000
1/26/2012	8:27:45 AM	PH3 MFC set to  0.000000
1/26/2012	8:27:45 AM	SiCl4 MFC set to  0.000000
1/26/2012	8:27:45 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	8:27:45 AM	Tube furnace set to 0
1/26/2012	8:28:46 AM	Helium valve closed
1/26/2012	8:28:46 AM	H2 valve closed
1/26/2012	8:28:46 AM	BCl3 valve closed
1/26/2012	8:28:46 AM	PH3 valve closed
1/26/2012	8:28:46 AM	SiCl4 pre valve closed
1/26/2012	8:28:46 AM	SiCl4 post valve closed
1/26/2012	8:28:46 AM	Main Vac valve closed
1/26/2012	8:28:46 AM	Bubbler valve closed
1/26/2012	8:28:46 AM	Bypass valve opened
1/26/2012	8:28:46 AM	Helium MFC set to  0.000000
1/26/2012	8:28:46 AM	H2 MFC set to  0.000000
1/26/2012	8:28:46 AM	BCl3 MFC set to  0.000000
1/26/2012	8:28:46 AM	PH3 MFC set to  0.000000
1/26/2012	8:28:46 AM	SiCl4 MFC set to  0.000000
1/26/2012	8:28:46 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	8:28:46 AM	Tube furnace set to 0
1/26/2012	8:29:46 AM	Helium valve closed
1/26/2012	8:29:46 AM	H2 valve closed
1/26/2012	8:29:46 AM	BCl3 valve closed
1/26/2012	8:29:46 AM	PH3 valve closed
1/26/2012	8:29:46 AM	SiCl4 pre valve closed
1/26/2012	8:29:46 AM	SiCl4 post valve closed
1/26/2012	8:29:46 AM	Bypass valve closed
1/26/2012	8:29:46 AM	Bubbler valve closed
1/26/2012	8:29:46 AM	Main Vac valve opened
1/26/2012	8:29:46 AM	Helium MFC set to  0.000000
1/26/2012	8:29:46 AM	H2 MFC set to  0.000000
1/26/2012	8:29:46 AM	BCl3 MFC set to  0.000000
1/26/2012	8:29:46 AM	PH3 MFC set to  0.000000
1/26/2012	8:29:46 AM	SiCl4 MFC set to  0.000000
1/26/2012	8:29:46 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	8:29:46 AM	Tube furnace set to 0
1/26/2012	8:29:47 AM	Run finished at 8:29 AM
1/26/2012	8:29:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/26/2012	8:45:13 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/26/2012	8:45:14 AM	Recipe started at 8:45 AM
1/26/2012	8:45:14 AM	Helium valve closed
1/26/2012	8:45:14 AM	H2 valve closed
1/26/2012	8:45:14 AM	BCl3 valve closed
1/26/2012	8:45:14 AM	PH3 valve closed
1/26/2012	8:45:14 AM	SiCl4 pre valve closed
1/26/2012	8:45:14 AM	SiCl4 post valve closed
1/26/2012	8:45:14 AM	Main Vac valve closed
1/26/2012	8:45:14 AM	Bypass valve closed
1/26/2012	8:45:14 AM	Bubbler valve closed
1/26/2012	8:45:14 AM	Helium MFC set to  0.000000
1/26/2012	8:45:14 AM	H2 MFC set to  0.000000
1/26/2012	8:45:14 AM	BCl3 MFC set to  0.000000
1/26/2012	8:45:14 AM	PH3 MFC set to  0.000000
1/26/2012	8:45:14 AM	SiCl4 MFC set to  0.000000
1/26/2012	8:45:14 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	8:45:14 AM	Tube furnace set to 0
1/26/2012	8:45:17 AM	H2 valve closed
1/26/2012	8:45:17 AM	BCl3 valve closed
1/26/2012	8:45:17 AM	PH3 valve closed
1/26/2012	8:45:17 AM	SiCl4 pre valve closed
1/26/2012	8:45:17 AM	SiCl4 post valve closed
1/26/2012	8:45:17 AM	Main Vac valve closed
1/26/2012	8:45:17 AM	Bypass valve closed
1/26/2012	8:45:17 AM	Bubbler valve closed
1/26/2012	8:45:17 AM	Helium valve opened
1/26/2012	8:45:17 AM	Helium MFC set to  500.000000
1/26/2012	8:45:17 AM	H2 MFC set to  0.000000
1/26/2012	8:45:17 AM	BCl3 MFC set to  0.000000
1/26/2012	8:45:17 AM	PH3 MFC set to  0.000000
1/26/2012	8:45:17 AM	SiCl4 MFC set to  0.000000
1/26/2012	8:45:17 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	8:45:18 AM	Tube furnace set to 0
1/26/2012	8:46:24 AM	Helium valve closed
1/26/2012	8:46:24 AM	H2 valve closed
1/26/2012	8:46:24 AM	BCl3 valve closed
1/26/2012	8:46:24 AM	PH3 valve closed
1/26/2012	8:46:24 AM	SiCl4 pre valve closed
1/26/2012	8:46:24 AM	SiCl4 post valve closed
1/26/2012	8:46:24 AM	Main Vac valve closed
1/26/2012	8:46:24 AM	Bypass valve closed
1/26/2012	8:46:24 AM	Bubbler valve closed
1/26/2012	8:46:24 AM	Helium MFC set to  0.000000
1/26/2012	8:46:24 AM	H2 MFC set to  0.000000
1/26/2012	8:46:24 AM	BCl3 MFC set to  0.000000
1/26/2012	8:46:24 AM	PH3 MFC set to  0.000000
1/26/2012	8:46:24 AM	SiCl4 MFC set to  0.000000
1/26/2012	8:46:24 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	8:46:24 AM	Tube furnace set to 0
1/26/2012	8:46:25 AM	Run finished at 8:46 AM
1/26/2012	8:46:25 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/26/2012	8:47:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/26/2012	8:47:50 AM	Recipe started at 8:47 AM
1/26/2012	8:47:50 AM	Helium valve closed
1/26/2012	8:47:50 AM	H2 valve closed
1/26/2012	8:47:50 AM	BCl3 valve closed
1/26/2012	8:47:50 AM	PH3 valve closed
1/26/2012	8:47:50 AM	SiCl4 pre valve closed
1/26/2012	8:47:50 AM	SiCl4 post valve closed
1/26/2012	8:47:50 AM	Main Vac valve closed
1/26/2012	8:47:50 AM	Bubbler valve closed
1/26/2012	8:47:50 AM	Bypass valve opened
1/26/2012	8:47:50 AM	Helium MFC set to  0.000000
1/26/2012	8:47:50 AM	H2 MFC set to  0.000000
1/26/2012	8:47:50 AM	BCl3 MFC set to  0.000000
1/26/2012	8:47:50 AM	PH3 MFC set to  0.000000
1/26/2012	8:47:50 AM	SiCl4 MFC set to  0.000000
1/26/2012	8:47:50 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	8:47:50 AM	Tube furnace set to 0
1/26/2012	8:48:46 AM	Helium valve closed
1/26/2012	8:48:46 AM	H2 valve closed
1/26/2012	8:48:46 AM	BCl3 valve closed
1/26/2012	8:48:46 AM	PH3 valve closed
1/26/2012	8:48:46 AM	SiCl4 pre valve closed
1/26/2012	8:48:46 AM	SiCl4 post valve closed
1/26/2012	8:48:46 AM	Main Vac valve closed
1/26/2012	8:48:46 AM	Bubbler valve closed
1/26/2012	8:48:46 AM	Bypass valve opened
1/26/2012	8:48:46 AM	Helium MFC set to  0.000000
1/26/2012	8:48:46 AM	H2 MFC set to  0.000000
1/26/2012	8:48:46 AM	BCl3 MFC set to  0.000000
1/26/2012	8:48:46 AM	PH3 MFC set to  0.000000
1/26/2012	8:48:46 AM	SiCl4 MFC set to  0.000000
1/26/2012	8:48:46 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	8:48:46 AM	Tube furnace set to 0
1/26/2012	8:49:46 AM	Helium valve closed
1/26/2012	8:49:46 AM	H2 valve closed
1/26/2012	8:49:46 AM	BCl3 valve closed
1/26/2012	8:49:46 AM	PH3 valve closed
1/26/2012	8:49:46 AM	SiCl4 pre valve closed
1/26/2012	8:49:46 AM	SiCl4 post valve closed
1/26/2012	8:49:46 AM	Bypass valve closed
1/26/2012	8:49:46 AM	Bubbler valve closed
1/26/2012	8:49:46 AM	Main Vac valve opened
1/26/2012	8:49:46 AM	Helium MFC set to  0.000000
1/26/2012	8:49:46 AM	H2 MFC set to  0.000000
1/26/2012	8:49:46 AM	BCl3 MFC set to  0.000000
1/26/2012	8:49:46 AM	PH3 MFC set to  0.000000
1/26/2012	8:49:46 AM	SiCl4 MFC set to  0.000000
1/26/2012	8:49:46 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	8:49:46 AM	Tube furnace set to 0
1/26/2012	8:49:47 AM	Run finished at 8:49 AM
1/26/2012	8:49:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/26/2012	9:19:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/26/2012	9:19:18 AM	Recipe started at 9:19 AM
1/26/2012	9:19:18 AM	Helium valve closed
1/26/2012	9:19:18 AM	H2 valve closed
1/26/2012	9:19:18 AM	BCl3 valve closed
1/26/2012	9:19:18 AM	PH3 valve closed
1/26/2012	9:19:18 AM	SiCl4 pre valve closed
1/26/2012	9:19:18 AM	SiCl4 post valve closed
1/26/2012	9:19:18 AM	Main Vac valve closed
1/26/2012	9:19:18 AM	Bypass valve closed
1/26/2012	9:19:18 AM	Bubbler valve closed
1/26/2012	9:19:18 AM	Helium MFC set to  0.000000
1/26/2012	9:19:18 AM	H2 MFC set to  0.000000
1/26/2012	9:19:18 AM	BCl3 MFC set to  0.000000
1/26/2012	9:19:18 AM	PH3 MFC set to  0.000000
1/26/2012	9:19:18 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:19:18 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:19:18 AM	Tube furnace set to 0
1/26/2012	9:19:21 AM	H2 valve closed
1/26/2012	9:19:21 AM	BCl3 valve closed
1/26/2012	9:19:21 AM	PH3 valve closed
1/26/2012	9:19:21 AM	SiCl4 pre valve closed
1/26/2012	9:19:21 AM	SiCl4 post valve closed
1/26/2012	9:19:21 AM	Main Vac valve closed
1/26/2012	9:19:21 AM	Bypass valve closed
1/26/2012	9:19:21 AM	Bubbler valve closed
1/26/2012	9:19:21 AM	Helium valve opened
1/26/2012	9:19:21 AM	Helium MFC set to  500.000000
1/26/2012	9:19:21 AM	H2 MFC set to  0.000000
1/26/2012	9:19:21 AM	BCl3 MFC set to  0.000000
1/26/2012	9:19:21 AM	PH3 MFC set to  0.000000
1/26/2012	9:19:21 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:19:21 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:19:22 AM	Tube furnace set to 0
1/26/2012	9:20:27 AM	Helium valve closed
1/26/2012	9:20:27 AM	H2 valve closed
1/26/2012	9:20:27 AM	BCl3 valve closed
1/26/2012	9:20:27 AM	PH3 valve closed
1/26/2012	9:20:27 AM	SiCl4 pre valve closed
1/26/2012	9:20:27 AM	SiCl4 post valve closed
1/26/2012	9:20:27 AM	Main Vac valve closed
1/26/2012	9:20:27 AM	Bypass valve closed
1/26/2012	9:20:27 AM	Bubbler valve closed
1/26/2012	9:20:27 AM	Helium MFC set to  0.000000
1/26/2012	9:20:27 AM	H2 MFC set to  0.000000
1/26/2012	9:20:27 AM	BCl3 MFC set to  0.000000
1/26/2012	9:20:27 AM	PH3 MFC set to  0.000000
1/26/2012	9:20:27 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:20:27 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:20:27 AM	Tube furnace set to 0
1/26/2012	9:20:28 AM	Run finished at 9:20 AM
1/26/2012	9:20:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/26/2012	9:23:33 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/26/2012	9:23:34 AM	Recipe started at 9:23 AM
1/26/2012	9:23:34 AM	Helium valve closed
1/26/2012	9:23:34 AM	H2 valve closed
1/26/2012	9:23:34 AM	BCl3 valve closed
1/26/2012	9:23:34 AM	PH3 valve closed
1/26/2012	9:23:34 AM	SiCl4 pre valve closed
1/26/2012	9:23:34 AM	SiCl4 post valve closed
1/26/2012	9:23:34 AM	Main Vac valve closed
1/26/2012	9:23:34 AM	Bubbler valve closed
1/26/2012	9:23:34 AM	Bypass valve opened
1/26/2012	9:23:34 AM	Helium MFC set to  0.000000
1/26/2012	9:23:34 AM	H2 MFC set to  0.000000
1/26/2012	9:23:34 AM	BCl3 MFC set to  0.000000
1/26/2012	9:23:34 AM	PH3 MFC set to  0.000000
1/26/2012	9:23:34 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:23:34 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:23:34 AM	Tube furnace set to 0
1/26/2012	9:24:31 AM	Helium valve closed
1/26/2012	9:24:31 AM	H2 valve closed
1/26/2012	9:24:31 AM	BCl3 valve closed
1/26/2012	9:24:31 AM	PH3 valve closed
1/26/2012	9:24:31 AM	SiCl4 pre valve closed
1/26/2012	9:24:31 AM	SiCl4 post valve closed
1/26/2012	9:24:31 AM	Main Vac valve closed
1/26/2012	9:24:31 AM	Bubbler valve closed
1/26/2012	9:24:31 AM	Bypass valve opened
1/26/2012	9:24:31 AM	Helium MFC set to  0.000000
1/26/2012	9:24:31 AM	H2 MFC set to  0.000000
1/26/2012	9:24:31 AM	BCl3 MFC set to  0.000000
1/26/2012	9:24:31 AM	PH3 MFC set to  0.000000
1/26/2012	9:24:31 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:24:31 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:24:31 AM	Tube furnace set to 0
1/26/2012	9:24:44 AM	Helium valve closed
1/26/2012	9:24:44 AM	H2 valve closed
1/26/2012	9:24:44 AM	BCl3 valve closed
1/26/2012	9:24:44 AM	PH3 valve closed
1/26/2012	9:24:44 AM	SiCl4 pre valve closed
1/26/2012	9:24:44 AM	SiCl4 post valve closed
1/26/2012	9:24:44 AM	Bypass valve closed
1/26/2012	9:24:44 AM	Bubbler valve closed
1/26/2012	9:24:44 AM	Main Vac valve opened
1/26/2012	9:24:44 AM	Helium MFC set to  0.000000
1/26/2012	9:24:44 AM	H2 MFC set to  0.000000
1/26/2012	9:24:44 AM	BCl3 MFC set to  0.000000
1/26/2012	9:24:44 AM	PH3 MFC set to  0.000000
1/26/2012	9:24:44 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:24:44 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:24:44 AM	Tube furnace set to 0
1/26/2012	9:24:45 AM	Run finished at 9:24 AM
1/26/2012	9:24:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/26/2012	9:26:26 AM	Recipe started at 9:26 AM
1/26/2012	9:26:26 AM	Helium valve closed
1/26/2012	9:26:26 AM	H2 valve closed
1/26/2012	9:26:26 AM	BCl3 valve closed
1/26/2012	9:26:26 AM	PH3 valve closed
1/26/2012	9:26:26 AM	SiCl4 pre valve closed
1/26/2012	9:26:26 AM	SiCl4 post valve closed
1/26/2012	9:26:26 AM	Bypass valve closed
1/26/2012	9:26:26 AM	Bubbler valve closed
1/26/2012	9:26:26 AM	Main Vac valve opened
1/26/2012	9:26:26 AM	Helium MFC set to  0.000000
1/26/2012	9:26:26 AM	H2 MFC set to  0.000000
1/26/2012	9:26:26 AM	BCl3 MFC set to  0.000000
1/26/2012	9:26:26 AM	PH3 MFC set to  0.000000
1/26/2012	9:26:26 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:26:26 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:26:27 AM	Tube furnace set to 150
1/26/2012	9:26:57 AM	H2 valve closed
1/26/2012	9:26:57 AM	BCl3 valve closed
1/26/2012	9:26:57 AM	PH3 valve closed
1/26/2012	9:26:57 AM	SiCl4 pre valve closed
1/26/2012	9:26:57 AM	SiCl4 post valve closed
1/26/2012	9:26:57 AM	Bypass valve closed
1/26/2012	9:26:57 AM	Bubbler valve closed
1/26/2012	9:26:57 AM	Helium valve opened
1/26/2012	9:26:57 AM	Main Vac valve opened
1/26/2012	9:26:57 AM	Helium MFC set to  20.000000
1/26/2012	9:26:57 AM	H2 MFC set to  0.000000
1/26/2012	9:26:57 AM	BCl3 MFC set to  0.000000
1/26/2012	9:26:57 AM	PH3 MFC set to  0.000000
1/26/2012	9:26:57 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:26:57 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:26:57 AM	Tube furnace set to 150
1/26/2012	9:27:27 AM	Helium valve closed
1/26/2012	9:27:27 AM	H2 valve closed
1/26/2012	9:27:27 AM	BCl3 valve closed
1/26/2012	9:27:27 AM	PH3 valve closed
1/26/2012	9:27:27 AM	SiCl4 pre valve closed
1/26/2012	9:27:27 AM	SiCl4 post valve closed
1/26/2012	9:27:27 AM	Bypass valve closed
1/26/2012	9:27:27 AM	Bubbler valve closed
1/26/2012	9:27:27 AM	Main Vac valve opened
1/26/2012	9:27:27 AM	Helium MFC set to  0.000000
1/26/2012	9:27:27 AM	H2 MFC set to  0.000000
1/26/2012	9:27:27 AM	BCl3 MFC set to  0.000000
1/26/2012	9:27:27 AM	PH3 MFC set to  0.000000
1/26/2012	9:27:27 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:27:27 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:27:27 AM	Tube furnace set to 150
1/26/2012	9:27:57 AM	H2 valve closed
1/26/2012	9:27:57 AM	BCl3 valve closed
1/26/2012	9:27:57 AM	PH3 valve closed
1/26/2012	9:27:57 AM	SiCl4 pre valve closed
1/26/2012	9:27:57 AM	SiCl4 post valve closed
1/26/2012	9:27:57 AM	Bypass valve closed
1/26/2012	9:27:57 AM	Bubbler valve closed
1/26/2012	9:27:57 AM	Helium valve opened
1/26/2012	9:27:57 AM	Main Vac valve opened
1/26/2012	9:27:57 AM	Helium MFC set to  20.000000
1/26/2012	9:27:57 AM	H2 MFC set to  0.000000
1/26/2012	9:27:57 AM	BCl3 MFC set to  0.000000
1/26/2012	9:27:57 AM	PH3 MFC set to  0.000000
1/26/2012	9:27:57 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:27:57 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:27:57 AM	Tube furnace set to 150
1/26/2012	9:28:27 AM	Helium valve closed
1/26/2012	9:28:27 AM	H2 valve closed
1/26/2012	9:28:27 AM	BCl3 valve closed
1/26/2012	9:28:27 AM	PH3 valve closed
1/26/2012	9:28:27 AM	SiCl4 pre valve closed
1/26/2012	9:28:27 AM	SiCl4 post valve closed
1/26/2012	9:28:27 AM	Bypass valve closed
1/26/2012	9:28:27 AM	Bubbler valve closed
1/26/2012	9:28:27 AM	Main Vac valve opened
1/26/2012	9:28:27 AM	Helium MFC set to  0.000000
1/26/2012	9:28:27 AM	H2 MFC set to  0.000000
1/26/2012	9:28:27 AM	BCl3 MFC set to  0.000000
1/26/2012	9:28:27 AM	PH3 MFC set to  0.000000
1/26/2012	9:28:27 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:28:27 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:28:27 AM	Tube furnace set to 150
1/26/2012	9:28:57 AM	H2 valve closed
1/26/2012	9:28:57 AM	BCl3 valve closed
1/26/2012	9:28:57 AM	PH3 valve closed
1/26/2012	9:28:57 AM	SiCl4 pre valve closed
1/26/2012	9:28:57 AM	SiCl4 post valve closed
1/26/2012	9:28:57 AM	Bypass valve closed
1/26/2012	9:28:57 AM	Bubbler valve closed
1/26/2012	9:28:57 AM	Helium valve opened
1/26/2012	9:28:57 AM	Main Vac valve opened
1/26/2012	9:28:57 AM	Helium MFC set to  20.000000
1/26/2012	9:28:57 AM	H2 MFC set to  0.000000
1/26/2012	9:28:57 AM	BCl3 MFC set to  0.000000
1/26/2012	9:28:57 AM	PH3 MFC set to  0.000000
1/26/2012	9:28:57 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:28:57 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:28:58 AM	Tube furnace set to 150
1/26/2012	9:29:28 AM	Helium valve closed
1/26/2012	9:29:28 AM	H2 valve closed
1/26/2012	9:29:28 AM	BCl3 valve closed
1/26/2012	9:29:28 AM	PH3 valve closed
1/26/2012	9:29:28 AM	SiCl4 pre valve closed
1/26/2012	9:29:28 AM	SiCl4 post valve closed
1/26/2012	9:29:28 AM	Bypass valve closed
1/26/2012	9:29:28 AM	Bubbler valve closed
1/26/2012	9:29:28 AM	Main Vac valve opened
1/26/2012	9:29:28 AM	Helium MFC set to  0.000000
1/26/2012	9:29:28 AM	H2 MFC set to  0.000000
1/26/2012	9:29:28 AM	BCl3 MFC set to  0.000000
1/26/2012	9:29:28 AM	PH3 MFC set to  0.000000
1/26/2012	9:29:28 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:29:28 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:29:28 AM	Tube furnace set to 150
1/26/2012	9:29:58 AM	H2 valve closed
1/26/2012	9:29:58 AM	BCl3 valve closed
1/26/2012	9:29:58 AM	PH3 valve closed
1/26/2012	9:29:58 AM	SiCl4 pre valve closed
1/26/2012	9:29:58 AM	SiCl4 post valve closed
1/26/2012	9:29:58 AM	Bypass valve closed
1/26/2012	9:29:58 AM	Bubbler valve closed
1/26/2012	9:29:58 AM	Helium valve opened
1/26/2012	9:29:58 AM	Main Vac valve opened
1/26/2012	9:29:58 AM	Helium MFC set to  20.000000
1/26/2012	9:29:58 AM	H2 MFC set to  0.000000
1/26/2012	9:29:58 AM	BCl3 MFC set to  0.000000
1/26/2012	9:29:58 AM	PH3 MFC set to  0.000000
1/26/2012	9:29:58 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:29:58 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:29:58 AM	Tube furnace set to 150
1/26/2012	9:30:28 AM	Helium valve closed
1/26/2012	9:30:28 AM	H2 valve closed
1/26/2012	9:30:28 AM	BCl3 valve closed
1/26/2012	9:30:28 AM	PH3 valve closed
1/26/2012	9:30:28 AM	SiCl4 pre valve closed
1/26/2012	9:30:28 AM	SiCl4 post valve closed
1/26/2012	9:30:28 AM	Bypass valve closed
1/26/2012	9:30:28 AM	Bubbler valve closed
1/26/2012	9:30:28 AM	Main Vac valve opened
1/26/2012	9:30:28 AM	Helium MFC set to  0.000000
1/26/2012	9:30:28 AM	H2 MFC set to  0.000000
1/26/2012	9:30:28 AM	BCl3 MFC set to  0.000000
1/26/2012	9:30:28 AM	PH3 MFC set to  0.000000
1/26/2012	9:30:28 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:30:28 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:30:28 AM	Tube furnace set to 150
1/26/2012	9:30:58 AM	H2 valve closed
1/26/2012	9:30:58 AM	BCl3 valve closed
1/26/2012	9:30:58 AM	PH3 valve closed
1/26/2012	9:30:58 AM	SiCl4 pre valve closed
1/26/2012	9:30:58 AM	SiCl4 post valve closed
1/26/2012	9:30:58 AM	Bypass valve closed
1/26/2012	9:30:58 AM	Bubbler valve closed
1/26/2012	9:30:58 AM	Helium valve opened
1/26/2012	9:30:58 AM	Main Vac valve opened
1/26/2012	9:30:58 AM	Helium MFC set to  20.000000
1/26/2012	9:30:58 AM	H2 MFC set to  0.000000
1/26/2012	9:30:58 AM	BCl3 MFC set to  0.000000
1/26/2012	9:30:58 AM	PH3 MFC set to  0.000000
1/26/2012	9:30:58 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:30:58 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:30:58 AM	Tube furnace set to 150
1/26/2012	9:31:28 AM	Helium valve closed
1/26/2012	9:31:28 AM	H2 valve closed
1/26/2012	9:31:28 AM	BCl3 valve closed
1/26/2012	9:31:28 AM	PH3 valve closed
1/26/2012	9:31:28 AM	SiCl4 pre valve closed
1/26/2012	9:31:28 AM	SiCl4 post valve closed
1/26/2012	9:31:28 AM	Bypass valve closed
1/26/2012	9:31:28 AM	Bubbler valve closed
1/26/2012	9:31:28 AM	Main Vac valve opened
1/26/2012	9:31:28 AM	Helium MFC set to  0.000000
1/26/2012	9:31:28 AM	H2 MFC set to  0.000000
1/26/2012	9:31:28 AM	BCl3 MFC set to  0.000000
1/26/2012	9:31:28 AM	PH3 MFC set to  0.000000
1/26/2012	9:31:28 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:31:28 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:31:29 AM	Tube furnace set to 150
1/26/2012	9:31:59 AM	H2 valve closed
1/26/2012	9:31:59 AM	BCl3 valve closed
1/26/2012	9:31:59 AM	PH3 valve closed
1/26/2012	9:31:59 AM	SiCl4 pre valve closed
1/26/2012	9:31:59 AM	SiCl4 post valve closed
1/26/2012	9:31:59 AM	Bypass valve closed
1/26/2012	9:31:59 AM	Bubbler valve closed
1/26/2012	9:31:59 AM	Helium valve opened
1/26/2012	9:31:59 AM	Main Vac valve opened
1/26/2012	9:31:59 AM	Helium MFC set to  20.000000
1/26/2012	9:31:59 AM	H2 MFC set to  0.000000
1/26/2012	9:31:59 AM	BCl3 MFC set to  0.000000
1/26/2012	9:31:59 AM	PH3 MFC set to  0.000000
1/26/2012	9:31:59 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:31:59 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:31:59 AM	Tube furnace set to 150
1/26/2012	9:32:29 AM	Helium valve closed
1/26/2012	9:32:29 AM	H2 valve closed
1/26/2012	9:32:29 AM	BCl3 valve closed
1/26/2012	9:32:29 AM	PH3 valve closed
1/26/2012	9:32:29 AM	SiCl4 pre valve closed
1/26/2012	9:32:29 AM	SiCl4 post valve closed
1/26/2012	9:32:29 AM	Bypass valve closed
1/26/2012	9:32:29 AM	Bubbler valve closed
1/26/2012	9:32:29 AM	Main Vac valve opened
1/26/2012	9:32:29 AM	Helium MFC set to  0.000000
1/26/2012	9:32:29 AM	H2 MFC set to  0.000000
1/26/2012	9:32:29 AM	BCl3 MFC set to  0.000000
1/26/2012	9:32:29 AM	PH3 MFC set to  0.000000
1/26/2012	9:32:29 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:32:29 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:32:29 AM	Tube furnace set to 150
1/26/2012	9:32:59 AM	H2 valve closed
1/26/2012	9:32:59 AM	BCl3 valve closed
1/26/2012	9:32:59 AM	PH3 valve closed
1/26/2012	9:32:59 AM	SiCl4 pre valve closed
1/26/2012	9:32:59 AM	SiCl4 post valve closed
1/26/2012	9:32:59 AM	Bypass valve closed
1/26/2012	9:32:59 AM	Bubbler valve closed
1/26/2012	9:32:59 AM	Helium valve opened
1/26/2012	9:32:59 AM	Main Vac valve opened
1/26/2012	9:32:59 AM	Helium MFC set to  20.000000
1/26/2012	9:32:59 AM	H2 MFC set to  0.000000
1/26/2012	9:32:59 AM	BCl3 MFC set to  0.000000
1/26/2012	9:32:59 AM	PH3 MFC set to  0.000000
1/26/2012	9:32:59 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:32:59 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:32:59 AM	Tube furnace set to 150
1/26/2012	9:33:29 AM	Helium valve closed
1/26/2012	9:33:29 AM	H2 valve closed
1/26/2012	9:33:29 AM	BCl3 valve closed
1/26/2012	9:33:29 AM	PH3 valve closed
1/26/2012	9:33:29 AM	SiCl4 pre valve closed
1/26/2012	9:33:29 AM	SiCl4 post valve closed
1/26/2012	9:33:29 AM	Bypass valve closed
1/26/2012	9:33:29 AM	Bubbler valve closed
1/26/2012	9:33:29 AM	Main Vac valve opened
1/26/2012	9:33:29 AM	Helium MFC set to  0.000000
1/26/2012	9:33:29 AM	H2 MFC set to  0.000000
1/26/2012	9:33:29 AM	BCl3 MFC set to  0.000000
1/26/2012	9:33:29 AM	PH3 MFC set to  0.000000
1/26/2012	9:33:29 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:33:29 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:33:29 AM	Tube furnace set to 150
1/26/2012	9:33:59 AM	H2 valve closed
1/26/2012	9:33:59 AM	BCl3 valve closed
1/26/2012	9:33:59 AM	PH3 valve closed
1/26/2012	9:33:59 AM	SiCl4 pre valve closed
1/26/2012	9:33:59 AM	SiCl4 post valve closed
1/26/2012	9:33:59 AM	Bypass valve closed
1/26/2012	9:33:59 AM	Bubbler valve closed
1/26/2012	9:33:59 AM	Helium valve opened
1/26/2012	9:33:59 AM	Main Vac valve opened
1/26/2012	9:33:59 AM	Helium MFC set to  20.000000
1/26/2012	9:33:59 AM	H2 MFC set to  0.000000
1/26/2012	9:33:59 AM	BCl3 MFC set to  0.000000
1/26/2012	9:33:59 AM	PH3 MFC set to  0.000000
1/26/2012	9:33:59 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:33:59 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:34:00 AM	Tube furnace set to 150
1/26/2012	9:34:30 AM	Helium valve closed
1/26/2012	9:34:30 AM	H2 valve closed
1/26/2012	9:34:30 AM	BCl3 valve closed
1/26/2012	9:34:30 AM	PH3 valve closed
1/26/2012	9:34:30 AM	SiCl4 pre valve closed
1/26/2012	9:34:30 AM	SiCl4 post valve closed
1/26/2012	9:34:30 AM	Bypass valve closed
1/26/2012	9:34:30 AM	Bubbler valve closed
1/26/2012	9:34:30 AM	Main Vac valve opened
1/26/2012	9:34:30 AM	Helium MFC set to  0.000000
1/26/2012	9:34:30 AM	H2 MFC set to  0.000000
1/26/2012	9:34:30 AM	BCl3 MFC set to  0.000000
1/26/2012	9:34:30 AM	PH3 MFC set to  0.000000
1/26/2012	9:34:30 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:34:30 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:34:30 AM	Tube furnace set to 150
1/26/2012	9:35:00 AM	H2 valve closed
1/26/2012	9:35:00 AM	BCl3 valve closed
1/26/2012	9:35:00 AM	PH3 valve closed
1/26/2012	9:35:00 AM	SiCl4 pre valve closed
1/26/2012	9:35:00 AM	SiCl4 post valve closed
1/26/2012	9:35:00 AM	Bypass valve closed
1/26/2012	9:35:00 AM	Bubbler valve closed
1/26/2012	9:35:00 AM	Helium valve opened
1/26/2012	9:35:00 AM	Main Vac valve opened
1/26/2012	9:35:00 AM	Helium MFC set to  20.000000
1/26/2012	9:35:00 AM	H2 MFC set to  0.000000
1/26/2012	9:35:00 AM	BCl3 MFC set to  0.000000
1/26/2012	9:35:00 AM	PH3 MFC set to  0.000000
1/26/2012	9:35:00 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:35:00 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:35:00 AM	Tube furnace set to 150
1/26/2012	9:35:30 AM	Helium valve closed
1/26/2012	9:35:30 AM	H2 valve closed
1/26/2012	9:35:30 AM	BCl3 valve closed
1/26/2012	9:35:30 AM	PH3 valve closed
1/26/2012	9:35:30 AM	SiCl4 pre valve closed
1/26/2012	9:35:30 AM	SiCl4 post valve closed
1/26/2012	9:35:30 AM	Bypass valve closed
1/26/2012	9:35:30 AM	Bubbler valve closed
1/26/2012	9:35:30 AM	Main Vac valve opened
1/26/2012	9:35:30 AM	Helium MFC set to  0.000000
1/26/2012	9:35:30 AM	H2 MFC set to  0.000000
1/26/2012	9:35:30 AM	BCl3 MFC set to  0.000000
1/26/2012	9:35:30 AM	PH3 MFC set to  0.000000
1/26/2012	9:35:30 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:35:30 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:35:30 AM	Tube furnace set to 150
1/26/2012	9:36:00 AM	H2 valve closed
1/26/2012	9:36:00 AM	BCl3 valve closed
1/26/2012	9:36:00 AM	PH3 valve closed
1/26/2012	9:36:00 AM	SiCl4 pre valve closed
1/26/2012	9:36:00 AM	SiCl4 post valve closed
1/26/2012	9:36:00 AM	Bypass valve closed
1/26/2012	9:36:00 AM	Bubbler valve closed
1/26/2012	9:36:00 AM	Helium valve opened
1/26/2012	9:36:00 AM	Main Vac valve opened
1/26/2012	9:36:00 AM	Helium MFC set to  20.000000
1/26/2012	9:36:00 AM	H2 MFC set to  0.000000
1/26/2012	9:36:00 AM	BCl3 MFC set to  0.000000
1/26/2012	9:36:00 AM	PH3 MFC set to  0.000000
1/26/2012	9:36:00 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:36:00 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:36:00 AM	Tube furnace set to 150
1/26/2012	9:36:30 AM	Helium valve closed
1/26/2012	9:36:31 AM	H2 valve closed
1/26/2012	9:36:31 AM	BCl3 valve closed
1/26/2012	9:36:31 AM	PH3 valve closed
1/26/2012	9:36:31 AM	SiCl4 pre valve closed
1/26/2012	9:36:31 AM	SiCl4 post valve closed
1/26/2012	9:36:31 AM	Bypass valve closed
1/26/2012	9:36:31 AM	Bubbler valve closed
1/26/2012	9:36:31 AM	Main Vac valve opened
1/26/2012	9:36:31 AM	Helium MFC set to  0.000000
1/26/2012	9:36:31 AM	H2 MFC set to  0.000000
1/26/2012	9:36:31 AM	BCl3 MFC set to  0.000000
1/26/2012	9:36:31 AM	PH3 MFC set to  0.000000
1/26/2012	9:36:31 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:36:31 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:36:31 AM	Tube furnace set to 150
1/26/2012	9:36:32 AM	Run finished at 9:36 AM
1/26/2012	9:39:35 AM	Recipe started at 9:39 AM
1/26/2012	9:39:35 AM	Helium valve closed
1/26/2012	9:39:35 AM	H2 valve closed
1/26/2012	9:39:35 AM	BCl3 valve closed
1/26/2012	9:39:35 AM	PH3 valve closed
1/26/2012	9:39:35 AM	SiCl4 pre valve closed
1/26/2012	9:39:35 AM	SiCl4 post valve closed
1/26/2012	9:39:35 AM	Bypass valve closed
1/26/2012	9:39:35 AM	Bubbler valve closed
1/26/2012	9:39:35 AM	Main Vac valve opened
1/26/2012	9:39:35 AM	Helium MFC set to  0.000000
1/26/2012	9:39:35 AM	H2 MFC set to  0.000000
1/26/2012	9:39:35 AM	BCl3 MFC set to  0.000000
1/26/2012	9:39:35 AM	PH3 MFC set to  0.000000
1/26/2012	9:39:35 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:39:35 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:39:35 AM	Tube furnace set to 150
1/26/2012	9:40:05 AM	H2 valve closed
1/26/2012	9:40:05 AM	BCl3 valve closed
1/26/2012	9:40:05 AM	PH3 valve closed
1/26/2012	9:40:05 AM	SiCl4 pre valve closed
1/26/2012	9:40:05 AM	SiCl4 post valve closed
1/26/2012	9:40:05 AM	Bypass valve closed
1/26/2012	9:40:05 AM	Bubbler valve closed
1/26/2012	9:40:05 AM	Helium valve opened
1/26/2012	9:40:05 AM	Main Vac valve opened
1/26/2012	9:40:05 AM	Helium MFC set to  20.000000
1/26/2012	9:40:05 AM	H2 MFC set to  0.000000
1/26/2012	9:40:05 AM	BCl3 MFC set to  0.000000
1/26/2012	9:40:05 AM	PH3 MFC set to  0.000000
1/26/2012	9:40:05 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:40:05 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:40:06 AM	Tube furnace set to 150
1/26/2012	9:40:36 AM	Helium valve closed
1/26/2012	9:40:36 AM	H2 valve closed
1/26/2012	9:40:36 AM	BCl3 valve closed
1/26/2012	9:40:36 AM	PH3 valve closed
1/26/2012	9:40:36 AM	SiCl4 pre valve closed
1/26/2012	9:40:36 AM	SiCl4 post valve closed
1/26/2012	9:40:36 AM	Bypass valve closed
1/26/2012	9:40:36 AM	Bubbler valve closed
1/26/2012	9:40:36 AM	Main Vac valve opened
1/26/2012	9:40:36 AM	Helium MFC set to  0.000000
1/26/2012	9:40:36 AM	H2 MFC set to  0.000000
1/26/2012	9:40:36 AM	BCl3 MFC set to  0.000000
1/26/2012	9:40:36 AM	PH3 MFC set to  0.000000
1/26/2012	9:40:36 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:40:36 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:40:36 AM	Tube furnace set to 150
1/26/2012	9:41:06 AM	H2 valve closed
1/26/2012	9:41:06 AM	BCl3 valve closed
1/26/2012	9:41:06 AM	PH3 valve closed
1/26/2012	9:41:06 AM	SiCl4 pre valve closed
1/26/2012	9:41:06 AM	SiCl4 post valve closed
1/26/2012	9:41:06 AM	Bypass valve closed
1/26/2012	9:41:06 AM	Bubbler valve closed
1/26/2012	9:41:06 AM	Helium valve opened
1/26/2012	9:41:06 AM	Main Vac valve opened
1/26/2012	9:41:06 AM	Helium MFC set to  20.000000
1/26/2012	9:41:06 AM	H2 MFC set to  0.000000
1/26/2012	9:41:06 AM	BCl3 MFC set to  0.000000
1/26/2012	9:41:06 AM	PH3 MFC set to  0.000000
1/26/2012	9:41:06 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:41:06 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:41:06 AM	Tube furnace set to 150
1/26/2012	9:41:36 AM	Helium valve closed
1/26/2012	9:41:36 AM	H2 valve closed
1/26/2012	9:41:36 AM	BCl3 valve closed
1/26/2012	9:41:36 AM	PH3 valve closed
1/26/2012	9:41:36 AM	SiCl4 pre valve closed
1/26/2012	9:41:36 AM	SiCl4 post valve closed
1/26/2012	9:41:36 AM	Bypass valve closed
1/26/2012	9:41:36 AM	Bubbler valve closed
1/26/2012	9:41:36 AM	Main Vac valve opened
1/26/2012	9:41:36 AM	Helium MFC set to  0.000000
1/26/2012	9:41:36 AM	H2 MFC set to  0.000000
1/26/2012	9:41:36 AM	BCl3 MFC set to  0.000000
1/26/2012	9:41:36 AM	PH3 MFC set to  0.000000
1/26/2012	9:41:36 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:41:36 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:41:36 AM	Tube furnace set to 150
1/26/2012	9:42:06 AM	H2 valve closed
1/26/2012	9:42:06 AM	BCl3 valve closed
1/26/2012	9:42:06 AM	PH3 valve closed
1/26/2012	9:42:06 AM	SiCl4 pre valve closed
1/26/2012	9:42:06 AM	SiCl4 post valve closed
1/26/2012	9:42:06 AM	Bypass valve closed
1/26/2012	9:42:06 AM	Bubbler valve closed
1/26/2012	9:42:06 AM	Helium valve opened
1/26/2012	9:42:06 AM	Main Vac valve opened
1/26/2012	9:42:06 AM	Helium MFC set to  20.000000
1/26/2012	9:42:06 AM	H2 MFC set to  0.000000
1/26/2012	9:42:06 AM	BCl3 MFC set to  0.000000
1/26/2012	9:42:06 AM	PH3 MFC set to  0.000000
1/26/2012	9:42:06 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:42:06 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:42:06 AM	Tube furnace set to 150
1/26/2012	9:42:36 AM	Helium valve closed
1/26/2012	9:42:36 AM	H2 valve closed
1/26/2012	9:42:36 AM	BCl3 valve closed
1/26/2012	9:42:36 AM	PH3 valve closed
1/26/2012	9:42:36 AM	SiCl4 pre valve closed
1/26/2012	9:42:36 AM	SiCl4 post valve closed
1/26/2012	9:42:36 AM	Bypass valve closed
1/26/2012	9:42:36 AM	Bubbler valve closed
1/26/2012	9:42:36 AM	Main Vac valve opened
1/26/2012	9:42:36 AM	Helium MFC set to  0.000000
1/26/2012	9:42:36 AM	H2 MFC set to  0.000000
1/26/2012	9:42:36 AM	BCl3 MFC set to  0.000000
1/26/2012	9:42:36 AM	PH3 MFC set to  0.000000
1/26/2012	9:42:36 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:42:36 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:42:37 AM	Tube furnace set to 150
1/26/2012	9:43:07 AM	H2 valve closed
1/26/2012	9:43:07 AM	BCl3 valve closed
1/26/2012	9:43:07 AM	PH3 valve closed
1/26/2012	9:43:07 AM	SiCl4 pre valve closed
1/26/2012	9:43:07 AM	SiCl4 post valve closed
1/26/2012	9:43:07 AM	Bypass valve closed
1/26/2012	9:43:07 AM	Bubbler valve closed
1/26/2012	9:43:07 AM	Helium valve opened
1/26/2012	9:43:07 AM	Main Vac valve opened
1/26/2012	9:43:07 AM	Helium MFC set to  20.000000
1/26/2012	9:43:07 AM	H2 MFC set to  0.000000
1/26/2012	9:43:07 AM	BCl3 MFC set to  0.000000
1/26/2012	9:43:07 AM	PH3 MFC set to  0.000000
1/26/2012	9:43:07 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:43:07 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:43:07 AM	Tube furnace set to 150
1/26/2012	9:43:37 AM	Helium valve closed
1/26/2012	9:43:37 AM	H2 valve closed
1/26/2012	9:43:37 AM	BCl3 valve closed
1/26/2012	9:43:37 AM	PH3 valve closed
1/26/2012	9:43:37 AM	SiCl4 pre valve closed
1/26/2012	9:43:37 AM	SiCl4 post valve closed
1/26/2012	9:43:37 AM	Bypass valve closed
1/26/2012	9:43:37 AM	Bubbler valve closed
1/26/2012	9:43:37 AM	Main Vac valve opened
1/26/2012	9:43:37 AM	Helium MFC set to  0.000000
1/26/2012	9:43:37 AM	H2 MFC set to  0.000000
1/26/2012	9:43:37 AM	BCl3 MFC set to  0.000000
1/26/2012	9:43:37 AM	PH3 MFC set to  0.000000
1/26/2012	9:43:37 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:43:37 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:43:37 AM	Tube furnace set to 150
1/26/2012	9:44:07 AM	H2 valve closed
1/26/2012	9:44:07 AM	BCl3 valve closed
1/26/2012	9:44:07 AM	PH3 valve closed
1/26/2012	9:44:07 AM	SiCl4 pre valve closed
1/26/2012	9:44:07 AM	SiCl4 post valve closed
1/26/2012	9:44:07 AM	Bypass valve closed
1/26/2012	9:44:07 AM	Bubbler valve closed
1/26/2012	9:44:07 AM	Helium valve opened
1/26/2012	9:44:07 AM	Main Vac valve opened
1/26/2012	9:44:07 AM	Helium MFC set to  20.000000
1/26/2012	9:44:07 AM	H2 MFC set to  0.000000
1/26/2012	9:44:07 AM	BCl3 MFC set to  0.000000
1/26/2012	9:44:07 AM	PH3 MFC set to  0.000000
1/26/2012	9:44:07 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:44:07 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:44:07 AM	Tube furnace set to 150
1/26/2012	9:44:37 AM	Helium valve closed
1/26/2012	9:44:37 AM	H2 valve closed
1/26/2012	9:44:37 AM	BCl3 valve closed
1/26/2012	9:44:37 AM	PH3 valve closed
1/26/2012	9:44:37 AM	SiCl4 pre valve closed
1/26/2012	9:44:37 AM	SiCl4 post valve closed
1/26/2012	9:44:37 AM	Bypass valve closed
1/26/2012	9:44:37 AM	Bubbler valve closed
1/26/2012	9:44:37 AM	Main Vac valve opened
1/26/2012	9:44:37 AM	Helium MFC set to  0.000000
1/26/2012	9:44:37 AM	H2 MFC set to  0.000000
1/26/2012	9:44:37 AM	BCl3 MFC set to  0.000000
1/26/2012	9:44:37 AM	PH3 MFC set to  0.000000
1/26/2012	9:44:37 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:44:37 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:44:37 AM	Tube furnace set to 150
1/26/2012	9:45:07 AM	H2 valve closed
1/26/2012	9:45:07 AM	BCl3 valve closed
1/26/2012	9:45:07 AM	PH3 valve closed
1/26/2012	9:45:07 AM	SiCl4 pre valve closed
1/26/2012	9:45:07 AM	SiCl4 post valve closed
1/26/2012	9:45:07 AM	Bypass valve closed
1/26/2012	9:45:07 AM	Bubbler valve closed
1/26/2012	9:45:07 AM	Helium valve opened
1/26/2012	9:45:07 AM	Main Vac valve opened
1/26/2012	9:45:07 AM	Helium MFC set to  20.000000
1/26/2012	9:45:07 AM	H2 MFC set to  0.000000
1/26/2012	9:45:07 AM	BCl3 MFC set to  0.000000
1/26/2012	9:45:07 AM	PH3 MFC set to  0.000000
1/26/2012	9:45:07 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:45:07 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:45:08 AM	Tube furnace set to 150
1/26/2012	9:45:38 AM	Helium valve closed
1/26/2012	9:45:38 AM	H2 valve closed
1/26/2012	9:45:38 AM	BCl3 valve closed
1/26/2012	9:45:38 AM	PH3 valve closed
1/26/2012	9:45:38 AM	SiCl4 pre valve closed
1/26/2012	9:45:38 AM	SiCl4 post valve closed
1/26/2012	9:45:38 AM	Bypass valve closed
1/26/2012	9:45:38 AM	Bubbler valve closed
1/26/2012	9:45:38 AM	Main Vac valve opened
1/26/2012	9:45:38 AM	Helium MFC set to  0.000000
1/26/2012	9:45:38 AM	H2 MFC set to  0.000000
1/26/2012	9:45:38 AM	BCl3 MFC set to  0.000000
1/26/2012	9:45:38 AM	PH3 MFC set to  0.000000
1/26/2012	9:45:38 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:45:38 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:45:38 AM	Tube furnace set to 150
1/26/2012	9:46:08 AM	H2 valve closed
1/26/2012	9:46:08 AM	BCl3 valve closed
1/26/2012	9:46:08 AM	PH3 valve closed
1/26/2012	9:46:08 AM	SiCl4 pre valve closed
1/26/2012	9:46:08 AM	SiCl4 post valve closed
1/26/2012	9:46:08 AM	Bypass valve closed
1/26/2012	9:46:08 AM	Bubbler valve closed
1/26/2012	9:46:08 AM	Helium valve opened
1/26/2012	9:46:08 AM	Main Vac valve opened
1/26/2012	9:46:08 AM	Helium MFC set to  20.000000
1/26/2012	9:46:08 AM	H2 MFC set to  0.000000
1/26/2012	9:46:08 AM	BCl3 MFC set to  0.000000
1/26/2012	9:46:08 AM	PH3 MFC set to  0.000000
1/26/2012	9:46:08 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:46:08 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:46:08 AM	Tube furnace set to 150
1/26/2012	9:46:38 AM	Helium valve closed
1/26/2012	9:46:38 AM	H2 valve closed
1/26/2012	9:46:38 AM	BCl3 valve closed
1/26/2012	9:46:38 AM	PH3 valve closed
1/26/2012	9:46:38 AM	SiCl4 pre valve closed
1/26/2012	9:46:38 AM	SiCl4 post valve closed
1/26/2012	9:46:38 AM	Bypass valve closed
1/26/2012	9:46:38 AM	Bubbler valve closed
1/26/2012	9:46:38 AM	Main Vac valve opened
1/26/2012	9:46:38 AM	Helium MFC set to  0.000000
1/26/2012	9:46:38 AM	H2 MFC set to  0.000000
1/26/2012	9:46:38 AM	BCl3 MFC set to  0.000000
1/26/2012	9:46:38 AM	PH3 MFC set to  0.000000
1/26/2012	9:46:38 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:46:38 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:46:38 AM	Tube furnace set to 150
1/26/2012	9:47:08 AM	H2 valve closed
1/26/2012	9:47:08 AM	BCl3 valve closed
1/26/2012	9:47:08 AM	PH3 valve closed
1/26/2012	9:47:08 AM	SiCl4 pre valve closed
1/26/2012	9:47:08 AM	SiCl4 post valve closed
1/26/2012	9:47:08 AM	Bypass valve closed
1/26/2012	9:47:08 AM	Bubbler valve closed
1/26/2012	9:47:08 AM	Helium valve opened
1/26/2012	9:47:08 AM	Main Vac valve opened
1/26/2012	9:47:08 AM	Helium MFC set to  20.000000
1/26/2012	9:47:08 AM	H2 MFC set to  0.000000
1/26/2012	9:47:08 AM	BCl3 MFC set to  0.000000
1/26/2012	9:47:08 AM	PH3 MFC set to  0.000000
1/26/2012	9:47:08 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:47:08 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:47:08 AM	Tube furnace set to 150
1/26/2012	9:47:38 AM	Helium valve closed
1/26/2012	9:47:38 AM	H2 valve closed
1/26/2012	9:47:38 AM	BCl3 valve closed
1/26/2012	9:47:38 AM	PH3 valve closed
1/26/2012	9:47:38 AM	SiCl4 pre valve closed
1/26/2012	9:47:38 AM	SiCl4 post valve closed
1/26/2012	9:47:38 AM	Bypass valve closed
1/26/2012	9:47:38 AM	Bubbler valve closed
1/26/2012	9:47:38 AM	Main Vac valve opened
1/26/2012	9:47:38 AM	Helium MFC set to  0.000000
1/26/2012	9:47:38 AM	H2 MFC set to  0.000000
1/26/2012	9:47:38 AM	BCl3 MFC set to  0.000000
1/26/2012	9:47:38 AM	PH3 MFC set to  0.000000
1/26/2012	9:47:38 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:47:38 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:47:39 AM	Tube furnace set to 150
1/26/2012	9:48:09 AM	H2 valve closed
1/26/2012	9:48:09 AM	BCl3 valve closed
1/26/2012	9:48:09 AM	PH3 valve closed
1/26/2012	9:48:09 AM	SiCl4 pre valve closed
1/26/2012	9:48:09 AM	SiCl4 post valve closed
1/26/2012	9:48:09 AM	Bypass valve closed
1/26/2012	9:48:09 AM	Bubbler valve closed
1/26/2012	9:48:09 AM	Helium valve opened
1/26/2012	9:48:09 AM	Main Vac valve opened
1/26/2012	9:48:09 AM	Helium MFC set to  20.000000
1/26/2012	9:48:09 AM	H2 MFC set to  0.000000
1/26/2012	9:48:09 AM	BCl3 MFC set to  0.000000
1/26/2012	9:48:09 AM	PH3 MFC set to  0.000000
1/26/2012	9:48:09 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:48:09 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:48:09 AM	Tube furnace set to 150
1/26/2012	9:48:39 AM	Helium valve closed
1/26/2012	9:48:39 AM	H2 valve closed
1/26/2012	9:48:39 AM	BCl3 valve closed
1/26/2012	9:48:39 AM	PH3 valve closed
1/26/2012	9:48:39 AM	SiCl4 pre valve closed
1/26/2012	9:48:39 AM	SiCl4 post valve closed
1/26/2012	9:48:39 AM	Bypass valve closed
1/26/2012	9:48:39 AM	Bubbler valve closed
1/26/2012	9:48:39 AM	Main Vac valve opened
1/26/2012	9:48:39 AM	Helium MFC set to  0.000000
1/26/2012	9:48:39 AM	H2 MFC set to  0.000000
1/26/2012	9:48:39 AM	BCl3 MFC set to  0.000000
1/26/2012	9:48:39 AM	PH3 MFC set to  0.000000
1/26/2012	9:48:39 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:48:39 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:48:39 AM	Tube furnace set to 150
1/26/2012	9:49:09 AM	H2 valve closed
1/26/2012	9:49:09 AM	BCl3 valve closed
1/26/2012	9:49:09 AM	PH3 valve closed
1/26/2012	9:49:09 AM	SiCl4 pre valve closed
1/26/2012	9:49:09 AM	SiCl4 post valve closed
1/26/2012	9:49:09 AM	Bypass valve closed
1/26/2012	9:49:09 AM	Bubbler valve closed
1/26/2012	9:49:09 AM	Helium valve opened
1/26/2012	9:49:09 AM	Main Vac valve opened
1/26/2012	9:49:09 AM	Helium MFC set to  20.000000
1/26/2012	9:49:09 AM	H2 MFC set to  0.000000
1/26/2012	9:49:09 AM	BCl3 MFC set to  0.000000
1/26/2012	9:49:09 AM	PH3 MFC set to  0.000000
1/26/2012	9:49:09 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:49:09 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:49:09 AM	Tube furnace set to 150
1/26/2012	9:49:39 AM	Helium valve closed
1/26/2012	9:49:39 AM	H2 valve closed
1/26/2012	9:49:39 AM	BCl3 valve closed
1/26/2012	9:49:39 AM	PH3 valve closed
1/26/2012	9:49:39 AM	SiCl4 pre valve closed
1/26/2012	9:49:39 AM	SiCl4 post valve closed
1/26/2012	9:49:39 AM	Bypass valve closed
1/26/2012	9:49:39 AM	Bubbler valve closed
1/26/2012	9:49:39 AM	Main Vac valve opened
1/26/2012	9:49:39 AM	Helium MFC set to  0.000000
1/26/2012	9:49:39 AM	H2 MFC set to  0.000000
1/26/2012	9:49:39 AM	BCl3 MFC set to  0.000000
1/26/2012	9:49:39 AM	PH3 MFC set to  0.000000
1/26/2012	9:49:39 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:49:39 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:49:39 AM	Tube furnace set to 150
1/26/2012	9:49:40 AM	Run finished at 9:49 AM
1/26/2012	9:54:35 AM	Main Vac valve closed
1/26/2012	9:55:11 AM	Main Vac valve opened
1/26/2012	9:56:31 AM	Recipe started at 9:56 AM
1/26/2012	9:56:31 AM	Helium valve closed
1/26/2012	9:56:31 AM	H2 valve closed
1/26/2012	9:56:31 AM	BCl3 valve closed
1/26/2012	9:56:31 AM	PH3 valve closed
1/26/2012	9:56:31 AM	SiCl4 pre valve closed
1/26/2012	9:56:31 AM	SiCl4 post valve closed
1/26/2012	9:56:31 AM	Main Vac valve closed
1/26/2012	9:56:31 AM	Bypass valve closed
1/26/2012	9:56:31 AM	Bubbler valve closed
1/26/2012	9:56:31 AM	Helium MFC set to  0.000000
1/26/2012	9:56:31 AM	H2 MFC set to  0.000000
1/26/2012	9:56:31 AM	BCl3 MFC set to  0.000000
1/26/2012	9:56:32 AM	PH3 MFC set to  0.000000
1/26/2012	9:56:32 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:56:32 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:56:32 AM	Tube furnace set to 0
1/26/2012	9:56:35 AM	Helium valve closed
1/26/2012	9:56:35 AM	BCl3 valve closed
1/26/2012	9:56:35 AM	PH3 valve closed
1/26/2012	9:56:35 AM	SiCl4 pre valve closed
1/26/2012	9:56:35 AM	SiCl4 post valve closed
1/26/2012	9:56:35 AM	Main Vac valve closed
1/26/2012	9:56:35 AM	Bypass valve closed
1/26/2012	9:56:35 AM	Bubbler valve closed
1/26/2012	9:56:35 AM	H2 valve opened
1/26/2012	9:56:35 AM	Helium MFC set to  0.000000
1/26/2012	9:56:35 AM	H2 MFC set to  500.000000
1/26/2012	9:56:35 AM	BCl3 MFC set to  0.000000
1/26/2012	9:56:35 AM	PH3 MFC set to  0.000000
1/26/2012	9:56:35 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:56:35 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:56:35 AM	Tube furnace set to 0
1/26/2012	9:57:39 AM	Helium valve closed
1/26/2012	9:57:39 AM	BCl3 valve closed
1/26/2012	9:57:39 AM	PH3 valve closed
1/26/2012	9:57:39 AM	SiCl4 pre valve closed
1/26/2012	9:57:39 AM	SiCl4 post valve closed
1/26/2012	9:57:39 AM	Main Vac valve closed
1/26/2012	9:57:39 AM	Bypass valve closed
1/26/2012	9:57:39 AM	H2 valve opened
1/26/2012	9:57:39 AM	Bubbler valve opened
1/26/2012	9:57:39 AM	Helium MFC set to  0.000000
1/26/2012	9:57:39 AM	H2 MFC set to  500.000000
1/26/2012	9:57:39 AM	BCl3 MFC set to  0.000000
1/26/2012	9:57:39 AM	PH3 MFC set to  0.000000
1/26/2012	9:57:39 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:57:39 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:57:40 AM	Tube furnace set to 0
1/26/2012	9:57:41 AM	Helium valve closed
1/26/2012	9:57:41 AM	BCl3 valve closed
1/26/2012	9:57:41 AM	PH3 valve closed
1/26/2012	9:57:41 AM	SiCl4 pre valve closed
1/26/2012	9:57:41 AM	SiCl4 post valve closed
1/26/2012	9:57:41 AM	Main Vac valve closed
1/26/2012	9:57:41 AM	Bypass valve closed
1/26/2012	9:57:41 AM	H2 valve opened
1/26/2012	9:57:41 AM	Bubbler valve opened
1/26/2012	9:57:41 AM	Helium MFC set to  0.000000
1/26/2012	9:57:41 AM	H2 MFC set to  500.000000
1/26/2012	9:57:41 AM	BCl3 MFC set to  0.000000
1/26/2012	9:57:41 AM	PH3 MFC set to  0.000000
1/26/2012	9:57:41 AM	SiCl4 MFC set to  0.000000
1/26/2012	9:57:41 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	9:57:41 AM	Tube furnace set to 950
1/26/2012	10:12:41 AM	Helium valve closed
1/26/2012	10:12:41 AM	PH3 valve closed
1/26/2012	10:12:41 AM	SiCl4 pre valve closed
1/26/2012	10:12:41 AM	SiCl4 post valve closed
1/26/2012	10:12:41 AM	Main Vac valve closed
1/26/2012	10:12:41 AM	Bypass valve closed
1/26/2012	10:12:41 AM	H2 valve opened
1/26/2012	10:12:41 AM	BCl3 valve opened
1/26/2012	10:12:41 AM	Bubbler valve opened
1/26/2012	10:12:41 AM	Helium MFC set to  0.000000
1/26/2012	10:12:41 AM	H2 MFC set to  400.000000
1/26/2012	10:12:41 AM	BCl3 MFC set to  20.000000
1/26/2012	10:12:41 AM	PH3 MFC set to  0.000000
1/26/2012	10:12:41 AM	SiCl4 MFC set to  0.000000
1/26/2012	10:12:41 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	10:12:41 AM	Tube furnace set to 950
1/26/2012	10:42:41 AM	Helium valve closed
1/26/2012	10:42:41 AM	BCl3 valve closed
1/26/2012	10:42:41 AM	PH3 valve closed
1/26/2012	10:42:41 AM	SiCl4 pre valve closed
1/26/2012	10:42:41 AM	SiCl4 post valve closed
1/26/2012	10:42:41 AM	Main Vac valve closed
1/26/2012	10:42:41 AM	Bypass valve closed
1/26/2012	10:42:41 AM	H2 valve opened
1/26/2012	10:42:41 AM	Bubbler valve opened
1/26/2012	10:42:41 AM	Helium MFC set to  0.000000
1/26/2012	10:42:41 AM	H2 MFC set to  500.000000
1/26/2012	10:42:41 AM	BCl3 MFC set to  0.000000
1/26/2012	10:42:41 AM	PH3 MFC set to  0.000000
1/26/2012	10:42:41 AM	SiCl4 MFC set to  0.000000
1/26/2012	10:42:41 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	10:42:41 AM	Tube furnace set to 750
1/26/2012	10:47:41 AM	H2 valve closed
1/26/2012	10:47:41 AM	BCl3 valve closed
1/26/2012	10:47:41 AM	PH3 valve closed
1/26/2012	10:47:41 AM	SiCl4 pre valve closed
1/26/2012	10:47:41 AM	SiCl4 post valve closed
1/26/2012	10:47:41 AM	Main Vac valve closed
1/26/2012	10:47:41 AM	Bypass valve closed
1/26/2012	10:47:41 AM	Helium valve opened
1/26/2012	10:47:41 AM	Bubbler valve opened
1/26/2012	10:47:41 AM	Helium MFC set to  500.000000
1/26/2012	10:47:41 AM	H2 MFC set to  0.000000
1/26/2012	10:47:41 AM	BCl3 MFC set to  0.000000
1/26/2012	10:47:41 AM	PH3 MFC set to  0.000000
1/26/2012	10:47:41 AM	SiCl4 MFC set to  0.000000
1/26/2012	10:47:41 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	10:47:41 AM	Tube furnace set to 0
1/26/2012	11:07:41 AM	Helium valve closed
1/26/2012	11:07:41 AM	H2 valve closed
1/26/2012	11:07:41 AM	BCl3 valve closed
1/26/2012	11:07:41 AM	PH3 valve closed
1/26/2012	11:07:41 AM	SiCl4 pre valve closed
1/26/2012	11:07:41 AM	SiCl4 post valve closed
1/26/2012	11:07:41 AM	Main Vac valve closed
1/26/2012	11:07:41 AM	Bypass valve closed
1/26/2012	11:07:41 AM	Bubbler valve closed
1/26/2012	11:07:41 AM	Helium MFC set to  0.000000
1/26/2012	11:07:41 AM	H2 MFC set to  0.000000
1/26/2012	11:07:41 AM	BCl3 MFC set to  0.000000
1/26/2012	11:07:41 AM	PH3 MFC set to  0.000000
1/26/2012	11:07:41 AM	SiCl4 MFC set to  0.000000
1/26/2012	11:07:41 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	11:07:41 AM	Tube furnace set to 0
1/26/2012	11:07:42 AM	Run finished at 11:07 AM
1/26/2012	11:38:12 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/26/2012	11:38:13 AM	Recipe started at 11:38 AM
1/26/2012	11:38:13 AM	Helium valve closed
1/26/2012	11:38:13 AM	H2 valve closed
1/26/2012	11:38:13 AM	BCl3 valve closed
1/26/2012	11:38:13 AM	PH3 valve closed
1/26/2012	11:38:13 AM	SiCl4 pre valve closed
1/26/2012	11:38:13 AM	SiCl4 post valve closed
1/26/2012	11:38:13 AM	Main Vac valve closed
1/26/2012	11:38:13 AM	Bypass valve closed
1/26/2012	11:38:13 AM	Bubbler valve closed
1/26/2012	11:38:13 AM	Helium MFC set to  0.000000
1/26/2012	11:38:13 AM	H2 MFC set to  0.000000
1/26/2012	11:38:13 AM	BCl3 MFC set to  0.000000
1/26/2012	11:38:13 AM	PH3 MFC set to  0.000000
1/26/2012	11:38:13 AM	SiCl4 MFC set to  0.000000
1/26/2012	11:38:13 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	11:38:13 AM	Tube furnace set to 0
1/26/2012	11:38:16 AM	H2 valve closed
1/26/2012	11:38:16 AM	BCl3 valve closed
1/26/2012	11:38:16 AM	PH3 valve closed
1/26/2012	11:38:16 AM	SiCl4 pre valve closed
1/26/2012	11:38:16 AM	SiCl4 post valve closed
1/26/2012	11:38:16 AM	Main Vac valve closed
1/26/2012	11:38:16 AM	Bypass valve closed
1/26/2012	11:38:16 AM	Bubbler valve closed
1/26/2012	11:38:16 AM	Helium valve opened
1/26/2012	11:38:16 AM	Helium MFC set to  500.000000
1/26/2012	11:38:16 AM	H2 MFC set to  0.000000
1/26/2012	11:38:16 AM	BCl3 MFC set to  0.000000
1/26/2012	11:38:16 AM	PH3 MFC set to  0.000000
1/26/2012	11:38:16 AM	SiCl4 MFC set to  0.000000
1/26/2012	11:38:16 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	11:38:16 AM	Tube furnace set to 0
1/26/2012	11:38:23 AM	Helium valve closed
1/26/2012	11:38:23 AM	H2 valve closed
1/26/2012	11:38:23 AM	BCl3 valve closed
1/26/2012	11:38:23 AM	PH3 valve closed
1/26/2012	11:38:23 AM	SiCl4 pre valve closed
1/26/2012	11:38:23 AM	SiCl4 post valve closed
1/26/2012	11:38:23 AM	Main Vac valve closed
1/26/2012	11:38:23 AM	Bypass valve closed
1/26/2012	11:38:23 AM	Bubbler valve closed
1/26/2012	11:38:23 AM	Helium MFC set to  0.000000
1/26/2012	11:38:23 AM	H2 MFC set to  0.000000
1/26/2012	11:38:23 AM	BCl3 MFC set to  0.000000
1/26/2012	11:38:23 AM	PH3 MFC set to  0.000000
1/26/2012	11:38:23 AM	SiCl4 MFC set to  0.000000
1/26/2012	11:38:23 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	11:38:24 AM	Tube furnace set to 0
1/26/2012	11:38:25 AM	Run finished at 11:38 AM
1/26/2012	11:38:25 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/26/2012	11:43:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/26/2012	11:43:11 AM	Recipe started at 11:43 AM
1/26/2012	11:43:11 AM	Helium valve closed
1/26/2012	11:43:11 AM	H2 valve closed
1/26/2012	11:43:11 AM	BCl3 valve closed
1/26/2012	11:43:11 AM	PH3 valve closed
1/26/2012	11:43:11 AM	SiCl4 pre valve closed
1/26/2012	11:43:11 AM	SiCl4 post valve closed
1/26/2012	11:43:11 AM	Main Vac valve closed
1/26/2012	11:43:11 AM	Bubbler valve closed
1/26/2012	11:43:11 AM	Bypass valve opened
1/26/2012	11:43:11 AM	Helium MFC set to  0.000000
1/26/2012	11:43:11 AM	H2 MFC set to  0.000000
1/26/2012	11:43:11 AM	BCl3 MFC set to  0.000000
1/26/2012	11:43:11 AM	PH3 MFC set to  0.000000
1/26/2012	11:43:11 AM	SiCl4 MFC set to  0.000000
1/26/2012	11:43:11 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	11:43:11 AM	Tube furnace set to 0
1/26/2012	11:44:11 AM	Helium valve closed
1/26/2012	11:44:11 AM	H2 valve closed
1/26/2012	11:44:11 AM	BCl3 valve closed
1/26/2012	11:44:11 AM	PH3 valve closed
1/26/2012	11:44:11 AM	SiCl4 pre valve closed
1/26/2012	11:44:11 AM	SiCl4 post valve closed
1/26/2012	11:44:11 AM	Main Vac valve closed
1/26/2012	11:44:11 AM	Bubbler valve closed
1/26/2012	11:44:11 AM	Bypass valve opened
1/26/2012	11:44:11 AM	Helium MFC set to  0.000000
1/26/2012	11:44:11 AM	H2 MFC set to  0.000000
1/26/2012	11:44:11 AM	BCl3 MFC set to  0.000000
1/26/2012	11:44:11 AM	PH3 MFC set to  0.000000
1/26/2012	11:44:11 AM	SiCl4 MFC set to  0.000000
1/26/2012	11:44:11 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	11:44:11 AM	Tube furnace set to 0
1/26/2012	11:44:48 AM	Helium valve closed
1/26/2012	11:44:48 AM	H2 valve closed
1/26/2012	11:44:48 AM	BCl3 valve closed
1/26/2012	11:44:48 AM	PH3 valve closed
1/26/2012	11:44:48 AM	SiCl4 pre valve closed
1/26/2012	11:44:48 AM	SiCl4 post valve closed
1/26/2012	11:44:48 AM	Bypass valve closed
1/26/2012	11:44:48 AM	Bubbler valve closed
1/26/2012	11:44:48 AM	Main Vac valve opened
1/26/2012	11:44:48 AM	Helium MFC set to  0.000000
1/26/2012	11:44:48 AM	H2 MFC set to  0.000000
1/26/2012	11:44:48 AM	BCl3 MFC set to  0.000000
1/26/2012	11:44:48 AM	PH3 MFC set to  0.000000
1/26/2012	11:44:48 AM	SiCl4 MFC set to  0.000000
1/26/2012	11:44:48 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	11:44:49 AM	Tube furnace set to 0
1/26/2012	11:44:50 AM	Run finished at 11:44 AM
1/26/2012	11:44:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/26/2012	11:47:16 AM	Recipe started at 11:47 AM
1/26/2012	11:47:16 AM	Helium valve closed
1/26/2012	11:47:16 AM	H2 valve closed
1/26/2012	11:47:16 AM	BCl3 valve closed
1/26/2012	11:47:16 AM	PH3 valve closed
1/26/2012	11:47:16 AM	SiCl4 pre valve closed
1/26/2012	11:47:16 AM	SiCl4 post valve closed
1/26/2012	11:47:16 AM	Bypass valve closed
1/26/2012	11:47:16 AM	Bubbler valve closed
1/26/2012	11:47:16 AM	Main Vac valve opened
1/26/2012	11:47:16 AM	Helium MFC set to  0.000000
1/26/2012	11:47:16 AM	H2 MFC set to  0.000000
1/26/2012	11:47:16 AM	BCl3 MFC set to  0.000000
1/26/2012	11:47:16 AM	PH3 MFC set to  0.000000
1/26/2012	11:47:16 AM	SiCl4 MFC set to  0.000000
1/26/2012	11:47:16 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	11:47:16 AM	Tube furnace set to 150
1/26/2012	11:47:46 AM	H2 valve closed
1/26/2012	11:47:46 AM	BCl3 valve closed
1/26/2012	11:47:46 AM	PH3 valve closed
1/26/2012	11:47:46 AM	SiCl4 pre valve closed
1/26/2012	11:47:46 AM	SiCl4 post valve closed
1/26/2012	11:47:46 AM	Bypass valve closed
1/26/2012	11:47:46 AM	Bubbler valve closed
1/26/2012	11:47:46 AM	Helium valve opened
1/26/2012	11:47:46 AM	Main Vac valve opened
1/26/2012	11:47:46 AM	Helium MFC set to  20.000000
1/26/2012	11:47:46 AM	H2 MFC set to  0.000000
1/26/2012	11:47:46 AM	BCl3 MFC set to  0.000000
1/26/2012	11:47:46 AM	PH3 MFC set to  0.000000
1/26/2012	11:47:46 AM	SiCl4 MFC set to  0.000000
1/26/2012	11:47:46 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	11:47:46 AM	Tube furnace set to 150
1/26/2012	11:48:16 AM	Helium valve closed
1/26/2012	11:48:16 AM	H2 valve closed
1/26/2012	11:48:16 AM	BCl3 valve closed
1/26/2012	11:48:16 AM	PH3 valve closed
1/26/2012	11:48:16 AM	SiCl4 pre valve closed
1/26/2012	11:48:16 AM	SiCl4 post valve closed
1/26/2012	11:48:16 AM	Bypass valve closed
1/26/2012	11:48:16 AM	Bubbler valve closed
1/26/2012	11:48:16 AM	Main Vac valve opened
1/26/2012	11:48:16 AM	Helium MFC set to  0.000000
1/26/2012	11:48:16 AM	H2 MFC set to  0.000000
1/26/2012	11:48:16 AM	BCl3 MFC set to  0.000000
1/26/2012	11:48:16 AM	PH3 MFC set to  0.000000
1/26/2012	11:48:16 AM	SiCl4 MFC set to  0.000000
1/26/2012	11:48:16 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	11:48:16 AM	Tube furnace set to 150
1/26/2012	11:48:46 AM	H2 valve closed
1/26/2012	11:48:46 AM	BCl3 valve closed
1/26/2012	11:48:46 AM	PH3 valve closed
1/26/2012	11:48:46 AM	SiCl4 pre valve closed
1/26/2012	11:48:46 AM	SiCl4 post valve closed
1/26/2012	11:48:46 AM	Bypass valve closed
1/26/2012	11:48:46 AM	Bubbler valve closed
1/26/2012	11:48:46 AM	Helium valve opened
1/26/2012	11:48:46 AM	Main Vac valve opened
1/26/2012	11:48:46 AM	Helium MFC set to  20.000000
1/26/2012	11:48:46 AM	H2 MFC set to  0.000000
1/26/2012	11:48:46 AM	BCl3 MFC set to  0.000000
1/26/2012	11:48:46 AM	PH3 MFC set to  0.000000
1/26/2012	11:48:46 AM	SiCl4 MFC set to  0.000000
1/26/2012	11:48:46 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	11:48:47 AM	Tube furnace set to 150
1/26/2012	11:49:17 AM	Helium valve closed
1/26/2012	11:49:17 AM	H2 valve closed
1/26/2012	11:49:17 AM	BCl3 valve closed
1/26/2012	11:49:17 AM	PH3 valve closed
1/26/2012	11:49:17 AM	SiCl4 pre valve closed
1/26/2012	11:49:17 AM	SiCl4 post valve closed
1/26/2012	11:49:17 AM	Bypass valve closed
1/26/2012	11:49:17 AM	Bubbler valve closed
1/26/2012	11:49:17 AM	Main Vac valve opened
1/26/2012	11:49:17 AM	Helium MFC set to  0.000000
1/26/2012	11:49:17 AM	H2 MFC set to  0.000000
1/26/2012	11:49:17 AM	BCl3 MFC set to  0.000000
1/26/2012	11:49:17 AM	PH3 MFC set to  0.000000
1/26/2012	11:49:17 AM	SiCl4 MFC set to  0.000000
1/26/2012	11:49:17 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	11:49:17 AM	Tube furnace set to 150
1/26/2012	11:49:47 AM	H2 valve closed
1/26/2012	11:49:47 AM	BCl3 valve closed
1/26/2012	11:49:47 AM	PH3 valve closed
1/26/2012	11:49:47 AM	SiCl4 pre valve closed
1/26/2012	11:49:47 AM	SiCl4 post valve closed
1/26/2012	11:49:47 AM	Bypass valve closed
1/26/2012	11:49:47 AM	Bubbler valve closed
1/26/2012	11:49:47 AM	Helium valve opened
1/26/2012	11:49:47 AM	Main Vac valve opened
1/26/2012	11:49:47 AM	Helium MFC set to  20.000000
1/26/2012	11:49:47 AM	H2 MFC set to  0.000000
1/26/2012	11:49:47 AM	BCl3 MFC set to  0.000000
1/26/2012	11:49:47 AM	PH3 MFC set to  0.000000
1/26/2012	11:49:47 AM	SiCl4 MFC set to  0.000000
1/26/2012	11:49:47 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	11:49:47 AM	Tube furnace set to 150
1/26/2012	11:50:17 AM	Helium valve closed
1/26/2012	11:50:17 AM	H2 valve closed
1/26/2012	11:50:17 AM	BCl3 valve closed
1/26/2012	11:50:17 AM	PH3 valve closed
1/26/2012	11:50:17 AM	SiCl4 pre valve closed
1/26/2012	11:50:17 AM	SiCl4 post valve closed
1/26/2012	11:50:17 AM	Bypass valve closed
1/26/2012	11:50:17 AM	Bubbler valve closed
1/26/2012	11:50:17 AM	Main Vac valve opened
1/26/2012	11:50:17 AM	Helium MFC set to  0.000000
1/26/2012	11:50:17 AM	H2 MFC set to  0.000000
1/26/2012	11:50:17 AM	BCl3 MFC set to  0.000000
1/26/2012	11:50:17 AM	PH3 MFC set to  0.000000
1/26/2012	11:50:17 AM	SiCl4 MFC set to  0.000000
1/26/2012	11:50:17 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	11:50:17 AM	Tube furnace set to 150
1/26/2012	11:50:47 AM	H2 valve closed
1/26/2012	11:50:47 AM	BCl3 valve closed
1/26/2012	11:50:47 AM	PH3 valve closed
1/26/2012	11:50:47 AM	SiCl4 pre valve closed
1/26/2012	11:50:47 AM	SiCl4 post valve closed
1/26/2012	11:50:47 AM	Bypass valve closed
1/26/2012	11:50:47 AM	Bubbler valve closed
1/26/2012	11:50:47 AM	Helium valve opened
1/26/2012	11:50:47 AM	Main Vac valve opened
1/26/2012	11:50:47 AM	Helium MFC set to  20.000000
1/26/2012	11:50:47 AM	H2 MFC set to  0.000000
1/26/2012	11:50:47 AM	BCl3 MFC set to  0.000000
1/26/2012	11:50:47 AM	PH3 MFC set to  0.000000
1/26/2012	11:50:47 AM	SiCl4 MFC set to  0.000000
1/26/2012	11:50:47 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	11:50:47 AM	Tube furnace set to 150
1/26/2012	11:51:17 AM	Helium valve closed
1/26/2012	11:51:17 AM	H2 valve closed
1/26/2012	11:51:17 AM	BCl3 valve closed
1/26/2012	11:51:17 AM	PH3 valve closed
1/26/2012	11:51:17 AM	SiCl4 pre valve closed
1/26/2012	11:51:17 AM	SiCl4 post valve closed
1/26/2012	11:51:17 AM	Bypass valve closed
1/26/2012	11:51:17 AM	Bubbler valve closed
1/26/2012	11:51:17 AM	Main Vac valve opened
1/26/2012	11:51:17 AM	Helium MFC set to  0.000000
1/26/2012	11:51:17 AM	H2 MFC set to  0.000000
1/26/2012	11:51:17 AM	BCl3 MFC set to  0.000000
1/26/2012	11:51:17 AM	PH3 MFC set to  0.000000
1/26/2012	11:51:17 AM	SiCl4 MFC set to  0.000000
1/26/2012	11:51:17 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	11:51:18 AM	Tube furnace set to 150
1/26/2012	11:51:48 AM	H2 valve closed
1/26/2012	11:51:48 AM	BCl3 valve closed
1/26/2012	11:51:48 AM	PH3 valve closed
1/26/2012	11:51:48 AM	SiCl4 pre valve closed
1/26/2012	11:51:48 AM	SiCl4 post valve closed
1/26/2012	11:51:48 AM	Bypass valve closed
1/26/2012	11:51:48 AM	Bubbler valve closed
1/26/2012	11:51:48 AM	Helium valve opened
1/26/2012	11:51:48 AM	Main Vac valve opened
1/26/2012	11:51:48 AM	Helium MFC set to  20.000000
1/26/2012	11:51:48 AM	H2 MFC set to  0.000000
1/26/2012	11:51:48 AM	BCl3 MFC set to  0.000000
1/26/2012	11:51:48 AM	PH3 MFC set to  0.000000
1/26/2012	11:51:48 AM	SiCl4 MFC set to  0.000000
1/26/2012	11:51:48 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	11:51:48 AM	Tube furnace set to 150
1/26/2012	11:52:18 AM	Helium valve closed
1/26/2012	11:52:18 AM	H2 valve closed
1/26/2012	11:52:18 AM	BCl3 valve closed
1/26/2012	11:52:18 AM	PH3 valve closed
1/26/2012	11:52:18 AM	SiCl4 pre valve closed
1/26/2012	11:52:18 AM	SiCl4 post valve closed
1/26/2012	11:52:18 AM	Bypass valve closed
1/26/2012	11:52:18 AM	Bubbler valve closed
1/26/2012	11:52:18 AM	Main Vac valve opened
1/26/2012	11:52:18 AM	Helium MFC set to  0.000000
1/26/2012	11:52:18 AM	H2 MFC set to  0.000000
1/26/2012	11:52:18 AM	BCl3 MFC set to  0.000000
1/26/2012	11:52:18 AM	PH3 MFC set to  0.000000
1/26/2012	11:52:18 AM	SiCl4 MFC set to  0.000000
1/26/2012	11:52:18 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	11:52:18 AM	Tube furnace set to 150
1/26/2012	11:52:48 AM	H2 valve closed
1/26/2012	11:52:48 AM	BCl3 valve closed
1/26/2012	11:52:48 AM	PH3 valve closed
1/26/2012	11:52:48 AM	SiCl4 pre valve closed
1/26/2012	11:52:48 AM	SiCl4 post valve closed
1/26/2012	11:52:48 AM	Bypass valve closed
1/26/2012	11:52:48 AM	Bubbler valve closed
1/26/2012	11:52:48 AM	Helium valve opened
1/26/2012	11:52:48 AM	Main Vac valve opened
1/26/2012	11:52:48 AM	Helium MFC set to  20.000000
1/26/2012	11:52:48 AM	H2 MFC set to  0.000000
1/26/2012	11:52:48 AM	BCl3 MFC set to  0.000000
1/26/2012	11:52:48 AM	PH3 MFC set to  0.000000
1/26/2012	11:52:48 AM	SiCl4 MFC set to  0.000000
1/26/2012	11:52:48 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	11:52:48 AM	Tube furnace set to 150
1/26/2012	11:53:18 AM	Helium valve closed
1/26/2012	11:53:18 AM	H2 valve closed
1/26/2012	11:53:18 AM	BCl3 valve closed
1/26/2012	11:53:18 AM	PH3 valve closed
1/26/2012	11:53:18 AM	SiCl4 pre valve closed
1/26/2012	11:53:18 AM	SiCl4 post valve closed
1/26/2012	11:53:18 AM	Bypass valve closed
1/26/2012	11:53:18 AM	Bubbler valve closed
1/26/2012	11:53:18 AM	Main Vac valve opened
1/26/2012	11:53:18 AM	Helium MFC set to  0.000000
1/26/2012	11:53:18 AM	H2 MFC set to  0.000000
1/26/2012	11:53:18 AM	BCl3 MFC set to  0.000000
1/26/2012	11:53:18 AM	PH3 MFC set to  0.000000
1/26/2012	11:53:18 AM	SiCl4 MFC set to  0.000000
1/26/2012	11:53:18 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	11:53:18 AM	Tube furnace set to 150
1/26/2012	11:53:48 AM	H2 valve closed
1/26/2012	11:53:48 AM	BCl3 valve closed
1/26/2012	11:53:48 AM	PH3 valve closed
1/26/2012	11:53:48 AM	SiCl4 pre valve closed
1/26/2012	11:53:48 AM	SiCl4 post valve closed
1/26/2012	11:53:48 AM	Bypass valve closed
1/26/2012	11:53:48 AM	Bubbler valve closed
1/26/2012	11:53:48 AM	Helium valve opened
1/26/2012	11:53:48 AM	Main Vac valve opened
1/26/2012	11:53:48 AM	Helium MFC set to  20.000000
1/26/2012	11:53:48 AM	H2 MFC set to  0.000000
1/26/2012	11:53:48 AM	BCl3 MFC set to  0.000000
1/26/2012	11:53:48 AM	PH3 MFC set to  0.000000
1/26/2012	11:53:48 AM	SiCl4 MFC set to  0.000000
1/26/2012	11:53:48 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	11:53:49 AM	Tube furnace set to 150
1/26/2012	11:54:19 AM	Helium valve closed
1/26/2012	11:54:19 AM	H2 valve closed
1/26/2012	11:54:19 AM	BCl3 valve closed
1/26/2012	11:54:19 AM	PH3 valve closed
1/26/2012	11:54:19 AM	SiCl4 pre valve closed
1/26/2012	11:54:19 AM	SiCl4 post valve closed
1/26/2012	11:54:19 AM	Bypass valve closed
1/26/2012	11:54:19 AM	Bubbler valve closed
1/26/2012	11:54:19 AM	Main Vac valve opened
1/26/2012	11:54:19 AM	Helium MFC set to  0.000000
1/26/2012	11:54:19 AM	H2 MFC set to  0.000000
1/26/2012	11:54:19 AM	BCl3 MFC set to  0.000000
1/26/2012	11:54:19 AM	PH3 MFC set to  0.000000
1/26/2012	11:54:19 AM	SiCl4 MFC set to  0.000000
1/26/2012	11:54:19 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	11:54:19 AM	Tube furnace set to 150
1/26/2012	11:54:49 AM	H2 valve closed
1/26/2012	11:54:49 AM	BCl3 valve closed
1/26/2012	11:54:49 AM	PH3 valve closed
1/26/2012	11:54:49 AM	SiCl4 pre valve closed
1/26/2012	11:54:49 AM	SiCl4 post valve closed
1/26/2012	11:54:49 AM	Bypass valve closed
1/26/2012	11:54:49 AM	Bubbler valve closed
1/26/2012	11:54:49 AM	Helium valve opened
1/26/2012	11:54:49 AM	Main Vac valve opened
1/26/2012	11:54:49 AM	Helium MFC set to  20.000000
1/26/2012	11:54:49 AM	H2 MFC set to  0.000000
1/26/2012	11:54:49 AM	BCl3 MFC set to  0.000000
1/26/2012	11:54:49 AM	PH3 MFC set to  0.000000
1/26/2012	11:54:49 AM	SiCl4 MFC set to  0.000000
1/26/2012	11:54:49 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	11:54:49 AM	Tube furnace set to 150
1/26/2012	11:55:19 AM	Helium valve closed
1/26/2012	11:55:19 AM	H2 valve closed
1/26/2012	11:55:19 AM	BCl3 valve closed
1/26/2012	11:55:19 AM	PH3 valve closed
1/26/2012	11:55:19 AM	SiCl4 pre valve closed
1/26/2012	11:55:19 AM	SiCl4 post valve closed
1/26/2012	11:55:19 AM	Bypass valve closed
1/26/2012	11:55:19 AM	Bubbler valve closed
1/26/2012	11:55:19 AM	Main Vac valve opened
1/26/2012	11:55:19 AM	Helium MFC set to  0.000000
1/26/2012	11:55:19 AM	H2 MFC set to  0.000000
1/26/2012	11:55:19 AM	BCl3 MFC set to  0.000000
1/26/2012	11:55:19 AM	PH3 MFC set to  0.000000
1/26/2012	11:55:19 AM	SiCl4 MFC set to  0.000000
1/26/2012	11:55:19 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	11:55:19 AM	Tube furnace set to 150
1/26/2012	11:55:49 AM	H2 valve closed
1/26/2012	11:55:49 AM	BCl3 valve closed
1/26/2012	11:55:49 AM	PH3 valve closed
1/26/2012	11:55:49 AM	SiCl4 pre valve closed
1/26/2012	11:55:49 AM	SiCl4 post valve closed
1/26/2012	11:55:49 AM	Bypass valve closed
1/26/2012	11:55:49 AM	Bubbler valve closed
1/26/2012	11:55:49 AM	Helium valve opened
1/26/2012	11:55:49 AM	Main Vac valve opened
1/26/2012	11:55:49 AM	Helium MFC set to  20.000000
1/26/2012	11:55:49 AM	H2 MFC set to  0.000000
1/26/2012	11:55:49 AM	BCl3 MFC set to  0.000000
1/26/2012	11:55:49 AM	PH3 MFC set to  0.000000
1/26/2012	11:55:49 AM	SiCl4 MFC set to  0.000000
1/26/2012	11:55:49 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	11:55:49 AM	Tube furnace set to 150
1/26/2012	11:56:19 AM	Helium valve closed
1/26/2012	11:56:19 AM	H2 valve closed
1/26/2012	11:56:19 AM	BCl3 valve closed
1/26/2012	11:56:19 AM	PH3 valve closed
1/26/2012	11:56:19 AM	SiCl4 pre valve closed
1/26/2012	11:56:19 AM	SiCl4 post valve closed
1/26/2012	11:56:19 AM	Bypass valve closed
1/26/2012	11:56:19 AM	Bubbler valve closed
1/26/2012	11:56:19 AM	Main Vac valve opened
1/26/2012	11:56:19 AM	Helium MFC set to  0.000000
1/26/2012	11:56:19 AM	H2 MFC set to  0.000000
1/26/2012	11:56:19 AM	BCl3 MFC set to  0.000000
1/26/2012	11:56:19 AM	PH3 MFC set to  0.000000
1/26/2012	11:56:19 AM	SiCl4 MFC set to  0.000000
1/26/2012	11:56:19 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	11:56:20 AM	Tube furnace set to 150
1/26/2012	11:56:50 AM	H2 valve closed
1/26/2012	11:56:50 AM	BCl3 valve closed
1/26/2012	11:56:50 AM	PH3 valve closed
1/26/2012	11:56:50 AM	SiCl4 pre valve closed
1/26/2012	11:56:50 AM	SiCl4 post valve closed
1/26/2012	11:56:50 AM	Bypass valve closed
1/26/2012	11:56:50 AM	Bubbler valve closed
1/26/2012	11:56:50 AM	Helium valve opened
1/26/2012	11:56:50 AM	Main Vac valve opened
1/26/2012	11:56:50 AM	Helium MFC set to  20.000000
1/26/2012	11:56:50 AM	H2 MFC set to  0.000000
1/26/2012	11:56:50 AM	BCl3 MFC set to  0.000000
1/26/2012	11:56:50 AM	PH3 MFC set to  0.000000
1/26/2012	11:56:50 AM	SiCl4 MFC set to  0.000000
1/26/2012	11:56:50 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	11:56:50 AM	Tube furnace set to 150
1/26/2012	11:57:20 AM	Helium valve closed
1/26/2012	11:57:20 AM	H2 valve closed
1/26/2012	11:57:20 AM	BCl3 valve closed
1/26/2012	11:57:20 AM	PH3 valve closed
1/26/2012	11:57:20 AM	SiCl4 pre valve closed
1/26/2012	11:57:20 AM	SiCl4 post valve closed
1/26/2012	11:57:20 AM	Bypass valve closed
1/26/2012	11:57:20 AM	Bubbler valve closed
1/26/2012	11:57:20 AM	Main Vac valve opened
1/26/2012	11:57:20 AM	Helium MFC set to  0.000000
1/26/2012	11:57:20 AM	H2 MFC set to  0.000000
1/26/2012	11:57:20 AM	BCl3 MFC set to  0.000000
1/26/2012	11:57:20 AM	PH3 MFC set to  0.000000
1/26/2012	11:57:20 AM	SiCl4 MFC set to  0.000000
1/26/2012	11:57:20 AM	Bypass solenoid MFC set to  0.000000
1/26/2012	11:57:20 AM	Tube furnace set to 150
1/26/2012	11:57:21 AM	Run finished at 11:57 AM
1/26/2012	1:48:34 PM	Main Vac valve closed
1/26/2012	1:49:15 PM	Main Vac valve opened
1/26/2012	1:50:25 PM	Recipe started at 1:50 PM
1/26/2012	1:50:25 PM	Helium valve closed
1/26/2012	1:50:25 PM	H2 valve closed
1/26/2012	1:50:25 PM	BCl3 valve closed
1/26/2012	1:50:25 PM	PH3 valve closed
1/26/2012	1:50:25 PM	SiCl4 pre valve closed
1/26/2012	1:50:25 PM	SiCl4 post valve closed
1/26/2012	1:50:25 PM	Main Vac valve closed
1/26/2012	1:50:25 PM	Bypass valve closed
1/26/2012	1:50:25 PM	Bubbler valve closed
1/26/2012	1:50:25 PM	Helium MFC set to  0.000000
1/26/2012	1:50:25 PM	H2 MFC set to  0.000000
1/26/2012	1:50:25 PM	BCl3 MFC set to  0.000000
1/26/2012	1:50:25 PM	PH3 MFC set to  0.000000
1/26/2012	1:50:25 PM	SiCl4 MFC set to  0.000000
1/26/2012	1:50:25 PM	Bypass solenoid MFC set to  0.000000
1/26/2012	1:50:25 PM	Tube furnace set to 0
1/26/2012	1:50:28 PM	Helium valve closed
1/26/2012	1:50:28 PM	BCl3 valve closed
1/26/2012	1:50:28 PM	PH3 valve closed
1/26/2012	1:50:28 PM	SiCl4 pre valve closed
1/26/2012	1:50:28 PM	SiCl4 post valve closed
1/26/2012	1:50:28 PM	Main Vac valve closed
1/26/2012	1:50:28 PM	Bypass valve closed
1/26/2012	1:50:28 PM	Bubbler valve closed
1/26/2012	1:50:28 PM	H2 valve opened
1/26/2012	1:50:28 PM	Helium MFC set to  0.000000
1/26/2012	1:50:28 PM	H2 MFC set to  500.000000
1/26/2012	1:50:28 PM	BCl3 MFC set to  0.000000
1/26/2012	1:50:28 PM	PH3 MFC set to  0.000000
1/26/2012	1:50:28 PM	SiCl4 MFC set to  0.000000
1/26/2012	1:50:28 PM	Bypass solenoid MFC set to  0.000000
1/26/2012	1:50:28 PM	Tube furnace set to 0
1/26/2012	1:51:34 PM	Helium valve closed
1/26/2012	1:51:34 PM	BCl3 valve closed
1/26/2012	1:51:34 PM	PH3 valve closed
1/26/2012	1:51:34 PM	SiCl4 pre valve closed
1/26/2012	1:51:34 PM	SiCl4 post valve closed
1/26/2012	1:51:34 PM	Main Vac valve closed
1/26/2012	1:51:34 PM	Bypass valve closed
1/26/2012	1:51:34 PM	H2 valve opened
1/26/2012	1:51:34 PM	Bubbler valve opened
1/26/2012	1:51:34 PM	Helium MFC set to  0.000000
1/26/2012	1:51:34 PM	H2 MFC set to  500.000000
1/26/2012	1:51:34 PM	BCl3 MFC set to  0.000000
1/26/2012	1:51:34 PM	PH3 MFC set to  0.000000
1/26/2012	1:51:34 PM	SiCl4 MFC set to  0.000000
1/26/2012	1:51:34 PM	Bypass solenoid MFC set to  0.000000
1/26/2012	1:51:34 PM	Tube furnace set to 0
1/26/2012	1:51:35 PM	Helium valve closed
1/26/2012	1:51:35 PM	BCl3 valve closed
1/26/2012	1:51:35 PM	PH3 valve closed
1/26/2012	1:51:35 PM	SiCl4 pre valve closed
1/26/2012	1:51:35 PM	SiCl4 post valve closed
1/26/2012	1:51:35 PM	Main Vac valve closed
1/26/2012	1:51:35 PM	Bypass valve closed
1/26/2012	1:51:35 PM	H2 valve opened
1/26/2012	1:51:35 PM	Bubbler valve opened
1/26/2012	1:51:35 PM	Helium MFC set to  0.000000
1/26/2012	1:51:35 PM	H2 MFC set to  500.000000
1/26/2012	1:51:35 PM	BCl3 MFC set to  0.000000
1/26/2012	1:51:35 PM	PH3 MFC set to  0.000000
1/26/2012	1:51:35 PM	SiCl4 MFC set to  0.000000
1/26/2012	1:51:35 PM	Bypass solenoid MFC set to  0.000000
1/26/2012	1:51:35 PM	Tube furnace set to 950
1/26/2012	2:06:35 PM	Helium valve closed
1/26/2012	2:06:35 PM	PH3 valve closed
1/26/2012	2:06:35 PM	SiCl4 pre valve closed
1/26/2012	2:06:35 PM	SiCl4 post valve closed
1/26/2012	2:06:35 PM	Main Vac valve closed
1/26/2012	2:06:35 PM	Bypass valve closed
1/26/2012	2:06:35 PM	H2 valve opened
1/26/2012	2:06:35 PM	BCl3 valve opened
1/26/2012	2:06:35 PM	Bubbler valve opened
1/26/2012	2:06:35 PM	Helium MFC set to  0.000000
1/26/2012	2:06:35 PM	H2 MFC set to  400.000000
1/26/2012	2:06:35 PM	BCl3 MFC set to  20.000000
1/26/2012	2:06:35 PM	PH3 MFC set to  0.000000
1/26/2012	2:06:35 PM	SiCl4 MFC set to  0.000000
1/26/2012	2:06:35 PM	Bypass solenoid MFC set to  0.000000
1/26/2012	2:06:35 PM	Tube furnace set to 950
1/26/2012	2:36:35 PM	Helium valve closed
1/26/2012	2:36:35 PM	BCl3 valve closed
1/26/2012	2:36:35 PM	PH3 valve closed
1/26/2012	2:36:35 PM	SiCl4 pre valve closed
1/26/2012	2:36:35 PM	SiCl4 post valve closed
1/26/2012	2:36:35 PM	Main Vac valve closed
1/26/2012	2:36:35 PM	Bypass valve closed
1/26/2012	2:36:35 PM	H2 valve opened
1/26/2012	2:36:35 PM	Bubbler valve opened
1/26/2012	2:36:35 PM	Helium MFC set to  0.000000
1/26/2012	2:36:35 PM	H2 MFC set to  500.000000
1/26/2012	2:36:35 PM	BCl3 MFC set to  0.000000
1/26/2012	2:36:35 PM	PH3 MFC set to  0.000000
1/26/2012	2:36:35 PM	SiCl4 MFC set to  0.000000
1/26/2012	2:36:35 PM	Bypass solenoid MFC set to  0.000000
1/26/2012	2:36:35 PM	Tube furnace set to 750
1/26/2012	2:41:35 PM	H2 valve closed
1/26/2012	2:41:35 PM	BCl3 valve closed
1/26/2012	2:41:35 PM	PH3 valve closed
1/26/2012	2:41:35 PM	SiCl4 pre valve closed
1/26/2012	2:41:35 PM	SiCl4 post valve closed
1/26/2012	2:41:35 PM	Main Vac valve closed
1/26/2012	2:41:35 PM	Bypass valve closed
1/26/2012	2:41:35 PM	Helium valve opened
1/26/2012	2:41:35 PM	Bubbler valve opened
1/26/2012	2:41:35 PM	Helium MFC set to  500.000000
1/26/2012	2:41:35 PM	H2 MFC set to  0.000000
1/26/2012	2:41:35 PM	BCl3 MFC set to  0.000000
1/26/2012	2:41:35 PM	PH3 MFC set to  0.000000
1/26/2012	2:41:35 PM	SiCl4 MFC set to  0.000000
1/26/2012	2:41:35 PM	Bypass solenoid MFC set to  0.000000
1/26/2012	2:41:36 PM	Tube furnace set to 0
1/26/2012	2:58:44 PM	Helium valve closed
1/26/2012	2:58:44 PM	H2 valve closed
1/26/2012	2:58:44 PM	BCl3 valve closed
1/26/2012	2:58:44 PM	PH3 valve closed
1/26/2012	2:58:44 PM	SiCl4 pre valve closed
1/26/2012	2:58:44 PM	SiCl4 post valve closed
1/26/2012	2:58:44 PM	Main Vac valve closed
1/26/2012	2:58:44 PM	Bypass valve closed
1/26/2012	2:58:44 PM	Bubbler valve closed
1/26/2012	2:58:44 PM	Helium MFC set to  0.000000
1/26/2012	2:58:44 PM	H2 MFC set to  0.000000
1/26/2012	2:58:44 PM	BCl3 MFC set to  0.000000
1/26/2012	2:58:44 PM	PH3 MFC set to  0.000000
1/26/2012	2:58:44 PM	SiCl4 MFC set to  0.000000
1/26/2012	2:58:44 PM	Bypass solenoid MFC set to  0.000000
1/26/2012	2:58:44 PM	Tube furnace set to 0
1/26/2012	2:58:45 PM	Run finished at 2:58 PM
1/26/2012	3:02:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/26/2012	3:02:01 PM	Recipe started at 3:02 PM
1/26/2012	3:02:01 PM	Helium valve closed
1/26/2012	3:02:01 PM	H2 valve closed
1/26/2012	3:02:01 PM	BCl3 valve closed
1/26/2012	3:02:01 PM	PH3 valve closed
1/26/2012	3:02:01 PM	SiCl4 pre valve closed
1/26/2012	3:02:01 PM	SiCl4 post valve closed
1/26/2012	3:02:01 PM	Main Vac valve closed
1/26/2012	3:02:01 PM	Bubbler valve closed
1/26/2012	3:02:01 PM	Bypass valve opened
1/26/2012	3:02:01 PM	Helium MFC set to  0.000000
1/26/2012	3:02:01 PM	H2 MFC set to  0.000000
1/26/2012	3:02:01 PM	BCl3 MFC set to  0.000000
1/26/2012	3:02:01 PM	PH3 MFC set to  0.000000
1/26/2012	3:02:01 PM	SiCl4 MFC set to  0.000000
1/26/2012	3:02:01 PM	Bypass solenoid MFC set to  0.000000
1/26/2012	3:02:02 PM	Tube furnace set to 0
1/26/2012	3:02:59 PM	Helium valve closed
1/26/2012	3:02:59 PM	H2 valve closed
1/26/2012	3:02:59 PM	BCl3 valve closed
1/26/2012	3:02:59 PM	PH3 valve closed
1/26/2012	3:02:59 PM	SiCl4 pre valve closed
1/26/2012	3:02:59 PM	SiCl4 post valve closed
1/26/2012	3:02:59 PM	Main Vac valve closed
1/26/2012	3:02:59 PM	Bubbler valve closed
1/26/2012	3:02:59 PM	Bypass valve opened
1/26/2012	3:02:59 PM	Helium MFC set to  0.000000
1/26/2012	3:02:59 PM	H2 MFC set to  0.000000
1/26/2012	3:02:59 PM	BCl3 MFC set to  0.000000
1/26/2012	3:02:59 PM	PH3 MFC set to  0.000000
1/26/2012	3:02:59 PM	SiCl4 MFC set to  0.000000
1/26/2012	3:02:59 PM	Bypass solenoid MFC set to  0.000000
1/26/2012	3:03:00 PM	Tube furnace set to 0
1/26/2012	3:04:00 PM	Helium valve closed
1/26/2012	3:04:00 PM	H2 valve closed
1/26/2012	3:04:00 PM	BCl3 valve closed
1/26/2012	3:04:00 PM	PH3 valve closed
1/26/2012	3:04:00 PM	SiCl4 pre valve closed
1/26/2012	3:04:00 PM	SiCl4 post valve closed
1/26/2012	3:04:00 PM	Bypass valve closed
1/26/2012	3:04:00 PM	Bubbler valve closed
1/26/2012	3:04:00 PM	Main Vac valve opened
1/26/2012	3:04:00 PM	Helium MFC set to  0.000000
1/26/2012	3:04:00 PM	H2 MFC set to  0.000000
1/26/2012	3:04:00 PM	BCl3 MFC set to  0.000000
1/26/2012	3:04:00 PM	PH3 MFC set to  0.000000
1/26/2012	3:04:00 PM	SiCl4 MFC set to  0.000000
1/26/2012	3:04:00 PM	Bypass solenoid MFC set to  0.000000
1/26/2012	3:04:00 PM	Tube furnace set to 0
1/26/2012	3:04:01 PM	Run finished at 3:04 PM
1/26/2012	3:04:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/26/2012	5:27:38 PM	Main Vac valve closed
1/26/2012	5:28:00 PM	Main Vac valve opened
1/26/2012	5:28:28 PM	Recipe started at 5:28 PM
1/26/2012	5:28:28 PM	Helium valve closed
1/26/2012	5:28:28 PM	H2 valve closed
1/26/2012	5:28:28 PM	BCl3 valve closed
1/26/2012	5:28:28 PM	PH3 valve closed
1/26/2012	5:28:28 PM	SiCl4 pre valve closed
1/26/2012	5:28:28 PM	SiCl4 post valve closed
1/26/2012	5:28:28 PM	Main Vac valve closed
1/26/2012	5:28:28 PM	Bypass valve closed
1/26/2012	5:28:28 PM	Bubbler valve closed
1/26/2012	5:28:28 PM	Helium MFC set to  0.000000
1/26/2012	5:28:28 PM	H2 MFC set to  0.000000
1/26/2012	5:28:28 PM	BCl3 MFC set to  0.000000
1/26/2012	5:28:28 PM	PH3 MFC set to  0.000000
1/26/2012	5:28:28 PM	SiCl4 MFC set to  0.000000
1/26/2012	5:28:28 PM	Bypass solenoid MFC set to  0.000000
1/26/2012	5:28:28 PM	Tube furnace set to 0
1/26/2012	5:28:31 PM	Helium valve closed
1/26/2012	5:28:31 PM	BCl3 valve closed
1/26/2012	5:28:31 PM	PH3 valve closed
1/26/2012	5:28:31 PM	SiCl4 pre valve closed
1/26/2012	5:28:31 PM	SiCl4 post valve closed
1/26/2012	5:28:31 PM	Main Vac valve closed
1/26/2012	5:28:31 PM	Bypass valve closed
1/26/2012	5:28:31 PM	Bubbler valve closed
1/26/2012	5:28:31 PM	H2 valve opened
1/26/2012	5:28:31 PM	Helium MFC set to  0.000000
1/26/2012	5:28:31 PM	H2 MFC set to  500.000000
1/26/2012	5:28:31 PM	BCl3 MFC set to  0.000000
1/26/2012	5:28:31 PM	PH3 MFC set to  0.000000
1/26/2012	5:28:31 PM	SiCl4 MFC set to  0.000000
1/26/2012	5:28:31 PM	Bypass solenoid MFC set to  0.000000
1/26/2012	5:28:31 PM	Tube furnace set to 0
1/26/2012	5:29:39 PM	Helium valve closed
1/26/2012	5:29:39 PM	BCl3 valve closed
1/26/2012	5:29:39 PM	PH3 valve closed
1/26/2012	5:29:39 PM	SiCl4 pre valve closed
1/26/2012	5:29:39 PM	SiCl4 post valve closed
1/26/2012	5:29:39 PM	Main Vac valve closed
1/26/2012	5:29:39 PM	Bypass valve closed
1/26/2012	5:29:39 PM	H2 valve opened
1/26/2012	5:29:39 PM	Bubbler valve opened
1/26/2012	5:29:39 PM	Helium MFC set to  0.000000
1/26/2012	5:29:39 PM	H2 MFC set to  500.000000
1/26/2012	5:29:39 PM	BCl3 MFC set to  0.000000
1/26/2012	5:29:39 PM	PH3 MFC set to  0.000000
1/26/2012	5:29:39 PM	SiCl4 MFC set to  0.000000
1/26/2012	5:29:39 PM	Bypass solenoid MFC set to  0.000000
1/26/2012	5:29:39 PM	Tube furnace set to 0
1/26/2012	5:29:40 PM	Helium valve closed
1/26/2012	5:29:40 PM	BCl3 valve closed
1/26/2012	5:29:40 PM	PH3 valve closed
1/26/2012	5:29:40 PM	SiCl4 pre valve closed
1/26/2012	5:29:40 PM	SiCl4 post valve closed
1/26/2012	5:29:40 PM	Main Vac valve closed
1/26/2012	5:29:40 PM	Bypass valve closed
1/26/2012	5:29:40 PM	H2 valve opened
1/26/2012	5:29:40 PM	Bubbler valve opened
1/26/2012	5:29:40 PM	Helium MFC set to  0.000000
1/26/2012	5:29:40 PM	H2 MFC set to  500.000000
1/26/2012	5:29:40 PM	BCl3 MFC set to  0.000000
1/26/2012	5:29:40 PM	PH3 MFC set to  0.000000
1/26/2012	5:29:40 PM	SiCl4 MFC set to  0.000000
1/26/2012	5:29:40 PM	Bypass solenoid MFC set to  0.000000
1/26/2012	5:29:41 PM	Tube furnace set to 950
1/26/2012	5:44:41 PM	Helium valve closed
1/26/2012	5:44:41 PM	PH3 valve closed
1/26/2012	5:44:41 PM	SiCl4 pre valve closed
1/26/2012	5:44:41 PM	SiCl4 post valve closed
1/26/2012	5:44:41 PM	Main Vac valve closed
1/26/2012	5:44:41 PM	Bypass valve closed
1/26/2012	5:44:41 PM	H2 valve opened
1/26/2012	5:44:41 PM	BCl3 valve opened
1/26/2012	5:44:41 PM	Bubbler valve opened
1/26/2012	5:44:41 PM	Helium MFC set to  0.000000
1/26/2012	5:44:41 PM	H2 MFC set to  400.000000
1/26/2012	5:44:41 PM	BCl3 MFC set to  20.000000
1/26/2012	5:44:41 PM	PH3 MFC set to  0.000000
1/26/2012	5:44:41 PM	SiCl4 MFC set to  0.000000
1/26/2012	5:44:41 PM	Bypass solenoid MFC set to  0.000000
1/26/2012	5:44:41 PM	Tube furnace set to 950
1/26/2012	6:14:41 PM	Helium valve closed
1/26/2012	6:14:41 PM	BCl3 valve closed
1/26/2012	6:14:41 PM	PH3 valve closed
1/26/2012	6:14:41 PM	SiCl4 pre valve closed
1/26/2012	6:14:41 PM	SiCl4 post valve closed
1/26/2012	6:14:41 PM	Main Vac valve closed
1/26/2012	6:14:41 PM	Bypass valve closed
1/26/2012	6:14:41 PM	H2 valve opened
1/26/2012	6:14:41 PM	Bubbler valve opened
1/26/2012	6:14:41 PM	Helium MFC set to  0.000000
1/26/2012	6:14:41 PM	H2 MFC set to  500.000000
1/26/2012	6:14:41 PM	BCl3 MFC set to  0.000000
1/26/2012	6:14:41 PM	PH3 MFC set to  0.000000
1/26/2012	6:14:41 PM	SiCl4 MFC set to  0.000000
1/26/2012	6:14:41 PM	Bypass solenoid MFC set to  0.000000
1/26/2012	6:14:41 PM	Tube furnace set to 750
1/26/2012	6:19:41 PM	H2 valve closed
1/26/2012	6:19:41 PM	BCl3 valve closed
1/26/2012	6:19:41 PM	PH3 valve closed
1/26/2012	6:19:41 PM	SiCl4 pre valve closed
1/26/2012	6:19:41 PM	SiCl4 post valve closed
1/26/2012	6:19:41 PM	Main Vac valve closed
1/26/2012	6:19:41 PM	Bypass valve closed
1/26/2012	6:19:41 PM	Helium valve opened
1/26/2012	6:19:41 PM	Bubbler valve opened
1/26/2012	6:19:41 PM	Helium MFC set to  500.000000
1/26/2012	6:19:41 PM	H2 MFC set to  0.000000
1/26/2012	6:19:41 PM	BCl3 MFC set to  0.000000
1/26/2012	6:19:41 PM	PH3 MFC set to  0.000000
1/26/2012	6:19:41 PM	SiCl4 MFC set to  0.000000
1/26/2012	6:19:41 PM	Bypass solenoid MFC set to  0.000000
1/26/2012	6:19:41 PM	Tube furnace set to 0
1/26/2012	6:39:41 PM	Helium valve closed
1/26/2012	6:39:41 PM	H2 valve closed
1/26/2012	6:39:41 PM	BCl3 valve closed
1/26/2012	6:39:41 PM	PH3 valve closed
1/26/2012	6:39:41 PM	SiCl4 pre valve closed
1/26/2012	6:39:41 PM	SiCl4 post valve closed
1/26/2012	6:39:41 PM	Main Vac valve closed
1/26/2012	6:39:41 PM	Bypass valve closed
1/26/2012	6:39:41 PM	Bubbler valve closed
1/26/2012	6:39:41 PM	Helium MFC set to  0.000000
1/26/2012	6:39:41 PM	H2 MFC set to  0.000000
1/26/2012	6:39:41 PM	BCl3 MFC set to  0.000000
1/26/2012	6:39:41 PM	PH3 MFC set to  0.000000
1/26/2012	6:39:41 PM	SiCl4 MFC set to  0.000000
1/26/2012	6:39:41 PM	Bypass solenoid MFC set to  0.000000
1/26/2012	6:39:41 PM	Tube furnace set to 0
1/26/2012	6:39:42 PM	Run finished at 6:39 PM
1/26/2012	7:38:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/26/2012	7:38:56 PM	Recipe started at 7:38 PM
1/26/2012	7:38:56 PM	Helium valve closed
1/26/2012	7:38:56 PM	H2 valve closed
1/26/2012	7:38:56 PM	BCl3 valve closed
1/26/2012	7:38:56 PM	PH3 valve closed
1/26/2012	7:38:56 PM	SiCl4 pre valve closed
1/26/2012	7:38:56 PM	SiCl4 post valve closed
1/26/2012	7:38:56 PM	Main Vac valve closed
1/26/2012	7:38:56 PM	Bypass valve closed
1/26/2012	7:38:56 PM	Bubbler valve closed
1/26/2012	7:38:56 PM	Helium MFC set to  0.000000
1/26/2012	7:38:56 PM	H2 MFC set to  0.000000
1/26/2012	7:38:56 PM	BCl3 MFC set to  0.000000
1/26/2012	7:38:56 PM	PH3 MFC set to  0.000000
1/26/2012	7:38:56 PM	SiCl4 MFC set to  0.000000
1/26/2012	7:38:56 PM	Bypass solenoid MFC set to  0.000000
1/26/2012	7:38:56 PM	Tube furnace set to 0
1/26/2012	7:38:59 PM	H2 valve closed
1/26/2012	7:38:59 PM	BCl3 valve closed
1/26/2012	7:38:59 PM	PH3 valve closed
1/26/2012	7:38:59 PM	SiCl4 pre valve closed
1/26/2012	7:38:59 PM	SiCl4 post valve closed
1/26/2012	7:38:59 PM	Main Vac valve closed
1/26/2012	7:38:59 PM	Bypass valve closed
1/26/2012	7:38:59 PM	Bubbler valve closed
1/26/2012	7:38:59 PM	Helium valve opened
1/26/2012	7:38:59 PM	Helium MFC set to  500.000000
1/26/2012	7:38:59 PM	H2 MFC set to  0.000000
1/26/2012	7:38:59 PM	BCl3 MFC set to  0.000000
1/26/2012	7:38:59 PM	PH3 MFC set to  0.000000
1/26/2012	7:38:59 PM	SiCl4 MFC set to  0.000000
1/26/2012	7:38:59 PM	Bypass solenoid MFC set to  0.000000
1/26/2012	7:38:59 PM	Tube furnace set to 0
1/26/2012	7:39:07 PM	Helium valve closed
1/26/2012	7:39:07 PM	H2 valve closed
1/26/2012	7:39:07 PM	BCl3 valve closed
1/26/2012	7:39:07 PM	PH3 valve closed
1/26/2012	7:39:07 PM	SiCl4 pre valve closed
1/26/2012	7:39:07 PM	SiCl4 post valve closed
1/26/2012	7:39:07 PM	Main Vac valve closed
1/26/2012	7:39:07 PM	Bypass valve closed
1/26/2012	7:39:07 PM	Bubbler valve closed
1/26/2012	7:39:07 PM	Helium MFC set to  0.000000
1/26/2012	7:39:07 PM	H2 MFC set to  0.000000
1/26/2012	7:39:07 PM	BCl3 MFC set to  0.000000
1/26/2012	7:39:07 PM	PH3 MFC set to  0.000000
1/26/2012	7:39:07 PM	SiCl4 MFC set to  0.000000
1/26/2012	7:39:07 PM	Bypass solenoid MFC set to  0.000000
1/26/2012	7:39:07 PM	Tube furnace set to 0
1/26/2012	7:39:08 PM	Run finished at 7:39 PM
1/26/2012	7:39:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/26/2012	7:40:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/26/2012	7:40:58 PM	Recipe started at 7:40 PM
1/26/2012	7:40:58 PM	Helium valve closed
1/26/2012	7:40:58 PM	H2 valve closed
1/26/2012	7:40:58 PM	BCl3 valve closed
1/26/2012	7:40:58 PM	PH3 valve closed
1/26/2012	7:40:58 PM	SiCl4 pre valve closed
1/26/2012	7:40:58 PM	SiCl4 post valve closed
1/26/2012	7:40:58 PM	Main Vac valve closed
1/26/2012	7:40:58 PM	Bubbler valve closed
1/26/2012	7:40:58 PM	Bypass valve opened
1/26/2012	7:40:58 PM	Helium MFC set to  0.000000
1/26/2012	7:40:58 PM	H2 MFC set to  0.000000
1/26/2012	7:40:58 PM	BCl3 MFC set to  0.000000
1/26/2012	7:40:58 PM	PH3 MFC set to  0.000000
1/26/2012	7:40:58 PM	SiCl4 MFC set to  0.000000
1/26/2012	7:40:58 PM	Bypass solenoid MFC set to  0.000000
1/26/2012	7:40:59 PM	Tube furnace set to 0
1/26/2012	7:41:55 PM	Helium valve closed
1/26/2012	7:41:55 PM	H2 valve closed
1/26/2012	7:41:55 PM	BCl3 valve closed
1/26/2012	7:41:55 PM	PH3 valve closed
1/26/2012	7:41:55 PM	SiCl4 pre valve closed
1/26/2012	7:41:55 PM	SiCl4 post valve closed
1/26/2012	7:41:55 PM	Main Vac valve closed
1/26/2012	7:41:55 PM	Bubbler valve closed
1/26/2012	7:41:55 PM	Bypass valve opened
1/26/2012	7:41:55 PM	Helium MFC set to  0.000000
1/26/2012	7:41:55 PM	H2 MFC set to  0.000000
1/26/2012	7:41:55 PM	BCl3 MFC set to  0.000000
1/26/2012	7:41:55 PM	PH3 MFC set to  0.000000
1/26/2012	7:41:55 PM	SiCl4 MFC set to  0.000000
1/26/2012	7:41:55 PM	Bypass solenoid MFC set to  0.000000
1/26/2012	7:41:55 PM	Tube furnace set to 0
1/26/2012	7:42:55 PM	Helium valve closed
1/26/2012	7:42:55 PM	H2 valve closed
1/26/2012	7:42:55 PM	BCl3 valve closed
1/26/2012	7:42:55 PM	PH3 valve closed
1/26/2012	7:42:55 PM	SiCl4 pre valve closed
1/26/2012	7:42:55 PM	SiCl4 post valve closed
1/26/2012	7:42:55 PM	Bypass valve closed
1/26/2012	7:42:55 PM	Bubbler valve closed
1/26/2012	7:42:55 PM	Main Vac valve opened
1/26/2012	7:42:55 PM	Helium MFC set to  0.000000
1/26/2012	7:42:55 PM	H2 MFC set to  0.000000
1/26/2012	7:42:55 PM	BCl3 MFC set to  0.000000
1/26/2012	7:42:55 PM	PH3 MFC set to  0.000000
1/26/2012	7:42:55 PM	SiCl4 MFC set to  0.000000
1/26/2012	7:42:55 PM	Bypass solenoid MFC set to  0.000000
1/26/2012	7:42:55 PM	Tube furnace set to 0
1/26/2012	7:42:56 PM	Run finished at 7:42 PM
1/26/2012	7:42:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
